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Bibliographic details for 18274808. PLASMA PROCESSING DEVICE, HIGH-FREQUENCY POWER SUPPLY CIRCUIT, AND IMPEDANCE MATCHING METHOD simplified abstract (Tokyo Electron Limited)

Citation styles for 18274808. PLASMA PROCESSING DEVICE, HIGH-FREQUENCY POWER SUPPLY CIRCUIT, AND IMPEDANCE MATCHING METHOD simplified abstract (Tokyo Electron Limited)

APA style

18274808. PLASMA PROCESSING DEVICE, HIGH-FREQUENCY POWER SUPPLY CIRCUIT, AND IMPEDANCE MATCHING METHOD simplified abstract (Tokyo Electron Limited). (2024, April 16). WikiPatents, . Retrieved 14:10, June 16, 2024 from http://wikipatents.org/index.php?title=18274808._PLASMA_PROCESSING_DEVICE,_HIGH-FREQUENCY_POWER_SUPPLY_CIRCUIT,_AND_IMPEDANCE_MATCHING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53838.

MLA style

"18274808. PLASMA PROCESSING DEVICE, HIGH-FREQUENCY POWER SUPPLY CIRCUIT, AND IMPEDANCE MATCHING METHOD simplified abstract (Tokyo Electron Limited)." WikiPatents, . 16 Apr 2024, 03:42 UTC. 16 Jun 2024, 14:10 <http://wikipatents.org/index.php?title=18274808._PLASMA_PROCESSING_DEVICE,_HIGH-FREQUENCY_POWER_SUPPLY_CIRCUIT,_AND_IMPEDANCE_MATCHING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53838>.

MHRA style

WikiPatents contributors, '18274808. PLASMA PROCESSING DEVICE, HIGH-FREQUENCY POWER SUPPLY CIRCUIT, AND IMPEDANCE MATCHING METHOD simplified abstract (Tokyo Electron Limited)', WikiPatents, , 16 April 2024, 03:42 UTC, <http://wikipatents.org/index.php?title=18274808._PLASMA_PROCESSING_DEVICE,_HIGH-FREQUENCY_POWER_SUPPLY_CIRCUIT,_AND_IMPEDANCE_MATCHING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53838> [accessed 16 June 2024]

Chicago style

WikiPatents contributors, "18274808. PLASMA PROCESSING DEVICE, HIGH-FREQUENCY POWER SUPPLY CIRCUIT, AND IMPEDANCE MATCHING METHOD simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=18274808._PLASMA_PROCESSING_DEVICE,_HIGH-FREQUENCY_POWER_SUPPLY_CIRCUIT,_AND_IMPEDANCE_MATCHING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53838 (accessed June 16, 2024).

CBE/CSE style

WikiPatents contributors. 18274808. PLASMA PROCESSING DEVICE, HIGH-FREQUENCY POWER SUPPLY CIRCUIT, AND IMPEDANCE MATCHING METHOD simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Apr 16, 03:42 UTC [cited 2024 Jun 16]. Available from: http://wikipatents.org/index.php?title=18274808._PLASMA_PROCESSING_DEVICE,_HIGH-FREQUENCY_POWER_SUPPLY_CIRCUIT,_AND_IMPEDANCE_MATCHING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53838.

Bluebook style

18274808. PLASMA PROCESSING DEVICE, HIGH-FREQUENCY POWER SUPPLY CIRCUIT, AND IMPEDANCE MATCHING METHOD simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=18274808._PLASMA_PROCESSING_DEVICE,_HIGH-FREQUENCY_POWER_SUPPLY_CIRCUIT,_AND_IMPEDANCE_MATCHING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53838 (last visited June 16, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18274808. PLASMA PROCESSING DEVICE, HIGH-FREQUENCY POWER SUPPLY CIRCUIT, AND IMPEDANCE MATCHING METHOD simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18274808._PLASMA_PROCESSING_DEVICE,_HIGH-FREQUENCY_POWER_SUPPLY_CIRCUIT,_AND_IMPEDANCE_MATCHING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53838",
   note = "[Online; accessed 16-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18274808. PLASMA PROCESSING DEVICE, HIGH-FREQUENCY POWER SUPPLY CIRCUIT, AND IMPEDANCE MATCHING METHOD simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18274808._PLASMA_PROCESSING_DEVICE,_HIGH-FREQUENCY_POWER_SUPPLY_CIRCUIT,_AND_IMPEDANCE_MATCHING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53838}",
   note = "[Online; accessed 16-June-2024]"
 }


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