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Bibliographic details for 18477060. FILM FORMING APPARATUS AND FILM FORMING METHOD simplified abstract (Tokyo Electron Limited)
- Page name: 18477060. FILM FORMING APPARATUS AND FILM FORMING METHOD simplified abstract (Tokyo Electron Limited)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 16 April 2024 03:42 UTC
- Date retrieved: 16 June 2024 10:33 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18477060._FILM_FORMING_APPARATUS_AND_FILM_FORMING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53832
- Page Version ID: 53832
Citation styles for 18477060. FILM FORMING APPARATUS AND FILM FORMING METHOD simplified abstract (Tokyo Electron Limited)
APA style
18477060. FILM FORMING APPARATUS AND FILM FORMING METHOD simplified abstract (Tokyo Electron Limited). (2024, April 16). WikiPatents, . Retrieved 10:33, June 16, 2024 from http://wikipatents.org/index.php?title=18477060._FILM_FORMING_APPARATUS_AND_FILM_FORMING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53832.
MLA style
"18477060. FILM FORMING APPARATUS AND FILM FORMING METHOD simplified abstract (Tokyo Electron Limited)." WikiPatents, . 16 Apr 2024, 03:42 UTC. 16 Jun 2024, 10:33 <http://wikipatents.org/index.php?title=18477060._FILM_FORMING_APPARATUS_AND_FILM_FORMING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53832>.
MHRA style
WikiPatents contributors, '18477060. FILM FORMING APPARATUS AND FILM FORMING METHOD simplified abstract (Tokyo Electron Limited)', WikiPatents, , 16 April 2024, 03:42 UTC, <http://wikipatents.org/index.php?title=18477060._FILM_FORMING_APPARATUS_AND_FILM_FORMING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53832> [accessed 16 June 2024]
Chicago style
WikiPatents contributors, "18477060. FILM FORMING APPARATUS AND FILM FORMING METHOD simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=18477060._FILM_FORMING_APPARATUS_AND_FILM_FORMING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53832 (accessed June 16, 2024).
CBE/CSE style
WikiPatents contributors. 18477060. FILM FORMING APPARATUS AND FILM FORMING METHOD simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Apr 16, 03:42 UTC [cited 2024 Jun 16]. Available from: http://wikipatents.org/index.php?title=18477060._FILM_FORMING_APPARATUS_AND_FILM_FORMING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53832.
Bluebook style
18477060. FILM FORMING APPARATUS AND FILM FORMING METHOD simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=18477060._FILM_FORMING_APPARATUS_AND_FILM_FORMING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53832 (last visited June 16, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18477060. FILM FORMING APPARATUS AND FILM FORMING METHOD simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18477060._FILM_FORMING_APPARATUS_AND_FILM_FORMING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53832",
note = "[Online; accessed 16-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18477060. FILM FORMING APPARATUS AND FILM FORMING METHOD simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18477060._FILM_FORMING_APPARATUS_AND_FILM_FORMING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53832}",
note = "[Online; accessed 16-June-2024]"
}
