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Bibliographic details for 18525131. METHOD FOR NON-RESIST NANOLITHOGRAPHY simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)

Citation styles for 18525131. METHOD FOR NON-RESIST NANOLITHOGRAPHY simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)

APA style

18525131. METHOD FOR NON-RESIST NANOLITHOGRAPHY simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.). (2024, April 15). WikiPatents, . Retrieved 11:30, June 24, 2024 from http://wikipatents.org/index.php?title=18525131._METHOD_FOR_NON-RESIST_NANOLITHOGRAPHY_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=52924.

MLA style

"18525131. METHOD FOR NON-RESIST NANOLITHOGRAPHY simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)." WikiPatents, . 15 Apr 2024, 17:31 UTC. 24 Jun 2024, 11:30 <http://wikipatents.org/index.php?title=18525131._METHOD_FOR_NON-RESIST_NANOLITHOGRAPHY_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=52924>.

MHRA style

WikiPatents contributors, '18525131. METHOD FOR NON-RESIST NANOLITHOGRAPHY simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)', WikiPatents, , 15 April 2024, 17:31 UTC, <http://wikipatents.org/index.php?title=18525131._METHOD_FOR_NON-RESIST_NANOLITHOGRAPHY_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=52924> [accessed 24 June 2024]

Chicago style

WikiPatents contributors, "18525131. METHOD FOR NON-RESIST NANOLITHOGRAPHY simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18525131._METHOD_FOR_NON-RESIST_NANOLITHOGRAPHY_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=52924 (accessed June 24, 2024).

CBE/CSE style

WikiPatents contributors. 18525131. METHOD FOR NON-RESIST NANOLITHOGRAPHY simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) [Internet]. WikiPatents, ; 2024 Apr 15, 17:31 UTC [cited 2024 Jun 24]. Available from: http://wikipatents.org/index.php?title=18525131._METHOD_FOR_NON-RESIST_NANOLITHOGRAPHY_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=52924.

Bluebook style

18525131. METHOD FOR NON-RESIST NANOLITHOGRAPHY simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.), http://wikipatents.org/index.php?title=18525131._METHOD_FOR_NON-RESIST_NANOLITHOGRAPHY_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=52924 (last visited June 24, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18525131. METHOD FOR NON-RESIST NANOLITHOGRAPHY simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18525131._METHOD_FOR_NON-RESIST_NANOLITHOGRAPHY_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=52924",
   note = "[Online; accessed 24-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18525131. METHOD FOR NON-RESIST NANOLITHOGRAPHY simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18525131._METHOD_FOR_NON-RESIST_NANOLITHOGRAPHY_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=52924}",
   note = "[Online; accessed 24-June-2024]"
 }


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