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Bibliographic details for 18370268. SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

Citation styles for 18370268. SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

APA style

18370268. SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.). (2024, April 12). WikiPatents, . Retrieved 09:56, June 17, 2024 from http://wikipatents.org/index.php?title=18370268._SUBSTRATE_PROCESSING_METHOD,_SUBSTRATE_PROCESSING_DEVICE,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=51637.

MLA style

"18370268. SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)." WikiPatents, . 12 Apr 2024, 11:00 UTC. 17 Jun 2024, 09:56 <http://wikipatents.org/index.php?title=18370268._SUBSTRATE_PROCESSING_METHOD,_SUBSTRATE_PROCESSING_DEVICE,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=51637>.

MHRA style

WikiPatents contributors, '18370268. SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)', WikiPatents, , 12 April 2024, 11:00 UTC, <http://wikipatents.org/index.php?title=18370268._SUBSTRATE_PROCESSING_METHOD,_SUBSTRATE_PROCESSING_DEVICE,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=51637> [accessed 17 June 2024]

Chicago style

WikiPatents contributors, "18370268. SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=18370268._SUBSTRATE_PROCESSING_METHOD,_SUBSTRATE_PROCESSING_DEVICE,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=51637 (accessed June 17, 2024).

CBE/CSE style

WikiPatents contributors. 18370268. SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) [Internet]. WikiPatents, ; 2024 Apr 12, 11:00 UTC [cited 2024 Jun 17]. Available from: http://wikipatents.org/index.php?title=18370268._SUBSTRATE_PROCESSING_METHOD,_SUBSTRATE_PROCESSING_DEVICE,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=51637.

Bluebook style

18370268. SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.), http://wikipatents.org/index.php?title=18370268._SUBSTRATE_PROCESSING_METHOD,_SUBSTRATE_PROCESSING_DEVICE,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=51637 (last visited June 17, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18370268. SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18370268._SUBSTRATE_PROCESSING_METHOD,_SUBSTRATE_PROCESSING_DEVICE,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=51637",
   note = "[Online; accessed 17-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18370268. SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18370268._SUBSTRATE_PROCESSING_METHOD,_SUBSTRATE_PROCESSING_DEVICE,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=51637}",
   note = "[Online; accessed 17-June-2024]"
 }


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