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Bibliographic details for 18203163. METHOD OF CORRECTING OVERLAY, METHOD OF CONTROLLING SEMICONDUCTOR PROCESS, AND SEMICONDUCTOR PROCESSING APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

Citation styles for 18203163. METHOD OF CORRECTING OVERLAY, METHOD OF CONTROLLING SEMICONDUCTOR PROCESS, AND SEMICONDUCTOR PROCESSING APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

APA style

18203163. METHOD OF CORRECTING OVERLAY, METHOD OF CONTROLLING SEMICONDUCTOR PROCESS, AND SEMICONDUCTOR PROCESSING APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.). (2024, April 12). WikiPatents, . Retrieved 11:00, June 17, 2024 from http://wikipatents.org/index.php?title=18203163._METHOD_OF_CORRECTING_OVERLAY,_METHOD_OF_CONTROLLING_SEMICONDUCTOR_PROCESS,_AND_SEMICONDUCTOR_PROCESSING_APPARATUS_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=51537.

MLA style

"18203163. METHOD OF CORRECTING OVERLAY, METHOD OF CONTROLLING SEMICONDUCTOR PROCESS, AND SEMICONDUCTOR PROCESSING APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)." WikiPatents, . 12 Apr 2024, 09:37 UTC. 17 Jun 2024, 11:00 <http://wikipatents.org/index.php?title=18203163._METHOD_OF_CORRECTING_OVERLAY,_METHOD_OF_CONTROLLING_SEMICONDUCTOR_PROCESS,_AND_SEMICONDUCTOR_PROCESSING_APPARATUS_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=51537>.

MHRA style

WikiPatents contributors, '18203163. METHOD OF CORRECTING OVERLAY, METHOD OF CONTROLLING SEMICONDUCTOR PROCESS, AND SEMICONDUCTOR PROCESSING APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)', WikiPatents, , 12 April 2024, 09:37 UTC, <http://wikipatents.org/index.php?title=18203163._METHOD_OF_CORRECTING_OVERLAY,_METHOD_OF_CONTROLLING_SEMICONDUCTOR_PROCESS,_AND_SEMICONDUCTOR_PROCESSING_APPARATUS_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=51537> [accessed 17 June 2024]

Chicago style

WikiPatents contributors, "18203163. METHOD OF CORRECTING OVERLAY, METHOD OF CONTROLLING SEMICONDUCTOR PROCESS, AND SEMICONDUCTOR PROCESSING APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=18203163._METHOD_OF_CORRECTING_OVERLAY,_METHOD_OF_CONTROLLING_SEMICONDUCTOR_PROCESS,_AND_SEMICONDUCTOR_PROCESSING_APPARATUS_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=51537 (accessed June 17, 2024).

CBE/CSE style

WikiPatents contributors. 18203163. METHOD OF CORRECTING OVERLAY, METHOD OF CONTROLLING SEMICONDUCTOR PROCESS, AND SEMICONDUCTOR PROCESSING APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) [Internet]. WikiPatents, ; 2024 Apr 12, 09:37 UTC [cited 2024 Jun 17]. Available from: http://wikipatents.org/index.php?title=18203163._METHOD_OF_CORRECTING_OVERLAY,_METHOD_OF_CONTROLLING_SEMICONDUCTOR_PROCESS,_AND_SEMICONDUCTOR_PROCESSING_APPARATUS_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=51537.

Bluebook style

18203163. METHOD OF CORRECTING OVERLAY, METHOD OF CONTROLLING SEMICONDUCTOR PROCESS, AND SEMICONDUCTOR PROCESSING APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.), http://wikipatents.org/index.php?title=18203163._METHOD_OF_CORRECTING_OVERLAY,_METHOD_OF_CONTROLLING_SEMICONDUCTOR_PROCESS,_AND_SEMICONDUCTOR_PROCESSING_APPARATUS_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=51537 (last visited June 17, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18203163. METHOD OF CORRECTING OVERLAY, METHOD OF CONTROLLING SEMICONDUCTOR PROCESS, AND SEMICONDUCTOR PROCESSING APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18203163._METHOD_OF_CORRECTING_OVERLAY,_METHOD_OF_CONTROLLING_SEMICONDUCTOR_PROCESS,_AND_SEMICONDUCTOR_PROCESSING_APPARATUS_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=51537",
   note = "[Online; accessed 17-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18203163. METHOD OF CORRECTING OVERLAY, METHOD OF CONTROLLING SEMICONDUCTOR PROCESS, AND SEMICONDUCTOR PROCESSING APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18203163._METHOD_OF_CORRECTING_OVERLAY,_METHOD_OF_CONTROLLING_SEMICONDUCTOR_PROCESS,_AND_SEMICONDUCTOR_PROCESSING_APPARATUS_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=51537}",
   note = "[Online; accessed 17-June-2024]"
 }


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