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Bibliographic details for Samsung electronics co., ltd. (20240120213). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract

Citation styles for Samsung electronics co., ltd. (20240120213). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract

APA style

Samsung electronics co., ltd. (20240120213). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract. (2024, April 12). WikiPatents, . Retrieved 15:43, June 17, 2024 from http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240120213)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=49735.

MLA style

"Samsung electronics co., ltd. (20240120213). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract." WikiPatents, . 12 Apr 2024, 07:16 UTC. 17 Jun 2024, 15:43 <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240120213)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=49735>.

MHRA style

WikiPatents contributors, 'Samsung electronics co., ltd. (20240120213). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract', WikiPatents, , 12 April 2024, 07:16 UTC, <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240120213)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=49735> [accessed 17 June 2024]

Chicago style

WikiPatents contributors, "Samsung electronics co., ltd. (20240120213). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240120213)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=49735 (accessed June 17, 2024).

CBE/CSE style

WikiPatents contributors. Samsung electronics co., ltd. (20240120213). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract [Internet]. WikiPatents, ; 2024 Apr 12, 07:16 UTC [cited 2024 Jun 17]. Available from: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240120213)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=49735.

Bluebook style

Samsung electronics co., ltd. (20240120213). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract, http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240120213)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=49735 (last visited June 17, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Samsung electronics co., ltd. (20240120213). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240120213)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=49735",
   note = "[Online; accessed 17-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Samsung electronics co., ltd. (20240120213). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240120213)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=49735}",
   note = "[Online; accessed 17-June-2024]"
 }


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