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Bibliographic details for Samsung electronics co., ltd. (20240120213). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract

Citation styles for Samsung electronics co., ltd. (20240120213). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract

APA style

Samsung electronics co., ltd. (20240120213). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract. (2024, April 12). WikiPatents, . Retrieved 12:16, June 26, 2024 from http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240120213)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=49735.

MLA style

"Samsung electronics co., ltd. (20240120213). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract." WikiPatents, . 12 Apr 2024, 07:16 UTC. 26 Jun 2024, 12:16 <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240120213)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=49735>.

MHRA style

WikiPatents contributors, 'Samsung electronics co., ltd. (20240120213). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract', WikiPatents, , 12 April 2024, 07:16 UTC, <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240120213)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=49735> [accessed 26 June 2024]

Chicago style

WikiPatents contributors, "Samsung electronics co., ltd. (20240120213). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240120213)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=49735 (accessed June 26, 2024).

CBE/CSE style

WikiPatents contributors. Samsung electronics co., ltd. (20240120213). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract [Internet]. WikiPatents, ; 2024 Apr 12, 07:16 UTC [cited 2024 Jun 26]. Available from: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240120213)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=49735.

Bluebook style

Samsung electronics co., ltd. (20240120213). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract, http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240120213)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=49735 (last visited June 26, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Samsung electronics co., ltd. (20240120213). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240120213)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=49735",
   note = "[Online; accessed 26-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Samsung electronics co., ltd. (20240120213). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240120213)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=49735}",
   note = "[Online; accessed 26-June-2024]"
 }


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