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Bibliographic details for Samsung electronics co., ltd. (20240120177). SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE simplified abstract

Citation styles for Samsung electronics co., ltd. (20240120177). SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE simplified abstract

APA style

Samsung electronics co., ltd. (20240120177). SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE simplified abstract. (2024, April 12). WikiPatents, . Retrieved 04:08, June 27, 2024 from http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240120177)._SUBSTRATE_PROCESSING_METHOD,_SUBSTRATE_PROCESSING_DEVICE,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=49731.

MLA style

"Samsung electronics co., ltd. (20240120177). SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE simplified abstract." WikiPatents, . 12 Apr 2024, 07:16 UTC. 27 Jun 2024, 04:08 <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240120177)._SUBSTRATE_PROCESSING_METHOD,_SUBSTRATE_PROCESSING_DEVICE,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=49731>.

MHRA style

WikiPatents contributors, 'Samsung electronics co., ltd. (20240120177). SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE simplified abstract', WikiPatents, , 12 April 2024, 07:16 UTC, <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240120177)._SUBSTRATE_PROCESSING_METHOD,_SUBSTRATE_PROCESSING_DEVICE,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=49731> [accessed 27 June 2024]

Chicago style

WikiPatents contributors, "Samsung electronics co., ltd. (20240120177). SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240120177)._SUBSTRATE_PROCESSING_METHOD,_SUBSTRATE_PROCESSING_DEVICE,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=49731 (accessed June 27, 2024).

CBE/CSE style

WikiPatents contributors. Samsung electronics co., ltd. (20240120177). SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE simplified abstract [Internet]. WikiPatents, ; 2024 Apr 12, 07:16 UTC [cited 2024 Jun 27]. Available from: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240120177)._SUBSTRATE_PROCESSING_METHOD,_SUBSTRATE_PROCESSING_DEVICE,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=49731.

Bluebook style

Samsung electronics co., ltd. (20240120177). SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE simplified abstract, http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240120177)._SUBSTRATE_PROCESSING_METHOD,_SUBSTRATE_PROCESSING_DEVICE,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=49731 (last visited June 27, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Samsung electronics co., ltd. (20240120177). SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240120177)._SUBSTRATE_PROCESSING_METHOD,_SUBSTRATE_PROCESSING_DEVICE,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=49731",
   note = "[Online; accessed 27-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Samsung electronics co., ltd. (20240120177). SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240120177)._SUBSTRATE_PROCESSING_METHOD,_SUBSTRATE_PROCESSING_DEVICE,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=49731}",
   note = "[Online; accessed 27-June-2024]"
 }


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