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Bibliographic details for Samsung electronics co., ltd. (20240105470). SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING THE SAME simplified abstract
- Page name: Samsung electronics co., ltd. (20240105470). SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING THE SAME simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 10 April 2024 07:08 UTC
- Date retrieved: 26 June 2024 12:41 UTC
- Permanent URL: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240105470)._SUBSTRATE_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_THE_SAME_simplified_abstract&oldid=47211
- Page Version ID: 47211
Citation styles for Samsung electronics co., ltd. (20240105470). SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING THE SAME simplified abstract
APA style
Samsung electronics co., ltd. (20240105470). SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING THE SAME simplified abstract. (2024, April 10). WikiPatents, . Retrieved 12:41, June 26, 2024 from http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240105470)._SUBSTRATE_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_THE_SAME_simplified_abstract&oldid=47211.
MLA style
"Samsung electronics co., ltd. (20240105470). SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING THE SAME simplified abstract." WikiPatents, . 10 Apr 2024, 07:08 UTC. 26 Jun 2024, 12:41 <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240105470)._SUBSTRATE_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_THE_SAME_simplified_abstract&oldid=47211>.
MHRA style
WikiPatents contributors, 'Samsung electronics co., ltd. (20240105470). SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING THE SAME simplified abstract', WikiPatents, , 10 April 2024, 07:08 UTC, <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240105470)._SUBSTRATE_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_THE_SAME_simplified_abstract&oldid=47211> [accessed 26 June 2024]
Chicago style
WikiPatents contributors, "Samsung electronics co., ltd. (20240105470). SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING THE SAME simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240105470)._SUBSTRATE_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_THE_SAME_simplified_abstract&oldid=47211 (accessed June 26, 2024).
CBE/CSE style
WikiPatents contributors. Samsung electronics co., ltd. (20240105470). SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING THE SAME simplified abstract [Internet]. WikiPatents, ; 2024 Apr 10, 07:08 UTC [cited 2024 Jun 26]. Available from: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240105470)._SUBSTRATE_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_THE_SAME_simplified_abstract&oldid=47211.
Bluebook style
Samsung electronics co., ltd. (20240105470). SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING THE SAME simplified abstract, http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240105470)._SUBSTRATE_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_THE_SAME_simplified_abstract&oldid=47211 (last visited June 26, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "Samsung electronics co., ltd. (20240105470). SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING THE SAME simplified abstract --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240105470)._SUBSTRATE_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_THE_SAME_simplified_abstract&oldid=47211",
note = "[Online; accessed 26-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "Samsung electronics co., ltd. (20240105470). SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING THE SAME simplified abstract --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240105470)._SUBSTRATE_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_THE_SAME_simplified_abstract&oldid=47211}",
note = "[Online; accessed 26-June-2024]"
}
