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Bibliographic details for US Patent Application 18187082. LITHOGRAPHY INFORMATION PROCESSING APPARATUS, LITHOGRAPHY SYSTEM, STORAGE MEDIUM, LITHOGRAPHY INFORMATION PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD simplified abstract
- Page name: US Patent Application 18187082. LITHOGRAPHY INFORMATION PROCESSING APPARATUS, LITHOGRAPHY SYSTEM, STORAGE MEDIUM, LITHOGRAPHY INFORMATION PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 30 October 2023 01:20 UTC
- Date retrieved: 26 June 2024 03:51 UTC
- Permanent URL: http://wikipatents.org/index.php?title=US_Patent_Application_18187082._LITHOGRAPHY_INFORMATION_PROCESSING_APPARATUS,_LITHOGRAPHY_SYSTEM,_STORAGE_MEDIUM,_LITHOGRAPHY_INFORMATION_PROCESSING_METHOD,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract&oldid=4666
- Page Version ID: 4666
Citation styles for US Patent Application 18187082. LITHOGRAPHY INFORMATION PROCESSING APPARATUS, LITHOGRAPHY SYSTEM, STORAGE MEDIUM, LITHOGRAPHY INFORMATION PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD simplified abstract
APA style
US Patent Application 18187082. LITHOGRAPHY INFORMATION PROCESSING APPARATUS, LITHOGRAPHY SYSTEM, STORAGE MEDIUM, LITHOGRAPHY INFORMATION PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD simplified abstract. (2023, October 30). WikiPatents, . Retrieved 03:51, June 26, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_18187082._LITHOGRAPHY_INFORMATION_PROCESSING_APPARATUS,_LITHOGRAPHY_SYSTEM,_STORAGE_MEDIUM,_LITHOGRAPHY_INFORMATION_PROCESSING_METHOD,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract&oldid=4666.
MLA style
"US Patent Application 18187082. LITHOGRAPHY INFORMATION PROCESSING APPARATUS, LITHOGRAPHY SYSTEM, STORAGE MEDIUM, LITHOGRAPHY INFORMATION PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD simplified abstract." WikiPatents, . 30 Oct 2023, 01:20 UTC. 26 Jun 2024, 03:51 <http://wikipatents.org/index.php?title=US_Patent_Application_18187082._LITHOGRAPHY_INFORMATION_PROCESSING_APPARATUS,_LITHOGRAPHY_SYSTEM,_STORAGE_MEDIUM,_LITHOGRAPHY_INFORMATION_PROCESSING_METHOD,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract&oldid=4666>.
MHRA style
WikiPatents contributors, 'US Patent Application 18187082. LITHOGRAPHY INFORMATION PROCESSING APPARATUS, LITHOGRAPHY SYSTEM, STORAGE MEDIUM, LITHOGRAPHY INFORMATION PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD simplified abstract', WikiPatents, , 30 October 2023, 01:20 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_18187082._LITHOGRAPHY_INFORMATION_PROCESSING_APPARATUS,_LITHOGRAPHY_SYSTEM,_STORAGE_MEDIUM,_LITHOGRAPHY_INFORMATION_PROCESSING_METHOD,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract&oldid=4666> [accessed 26 June 2024]
Chicago style
WikiPatents contributors, "US Patent Application 18187082. LITHOGRAPHY INFORMATION PROCESSING APPARATUS, LITHOGRAPHY SYSTEM, STORAGE MEDIUM, LITHOGRAPHY INFORMATION PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_18187082._LITHOGRAPHY_INFORMATION_PROCESSING_APPARATUS,_LITHOGRAPHY_SYSTEM,_STORAGE_MEDIUM,_LITHOGRAPHY_INFORMATION_PROCESSING_METHOD,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract&oldid=4666 (accessed June 26, 2024).
CBE/CSE style
WikiPatents contributors. US Patent Application 18187082. LITHOGRAPHY INFORMATION PROCESSING APPARATUS, LITHOGRAPHY SYSTEM, STORAGE MEDIUM, LITHOGRAPHY INFORMATION PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD simplified abstract [Internet]. WikiPatents, ; 2023 Oct 30, 01:20 UTC [cited 2024 Jun 26]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_18187082._LITHOGRAPHY_INFORMATION_PROCESSING_APPARATUS,_LITHOGRAPHY_SYSTEM,_STORAGE_MEDIUM,_LITHOGRAPHY_INFORMATION_PROCESSING_METHOD,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract&oldid=4666.
Bluebook style
US Patent Application 18187082. LITHOGRAPHY INFORMATION PROCESSING APPARATUS, LITHOGRAPHY SYSTEM, STORAGE MEDIUM, LITHOGRAPHY INFORMATION PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_18187082._LITHOGRAPHY_INFORMATION_PROCESSING_APPARATUS,_LITHOGRAPHY_SYSTEM,_STORAGE_MEDIUM,_LITHOGRAPHY_INFORMATION_PROCESSING_METHOD,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract&oldid=4666 (last visited June 26, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "US Patent Application 18187082. LITHOGRAPHY INFORMATION PROCESSING APPARATUS, LITHOGRAPHY SYSTEM, STORAGE MEDIUM, LITHOGRAPHY INFORMATION PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD simplified abstract --- WikiPatents{,} ", year = "2023", url = "http://wikipatents.org/index.php?title=US_Patent_Application_18187082._LITHOGRAPHY_INFORMATION_PROCESSING_APPARATUS,_LITHOGRAPHY_SYSTEM,_STORAGE_MEDIUM,_LITHOGRAPHY_INFORMATION_PROCESSING_METHOD,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract&oldid=4666", note = "[Online; accessed 26-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "US Patent Application 18187082. LITHOGRAPHY INFORMATION PROCESSING APPARATUS, LITHOGRAPHY SYSTEM, STORAGE MEDIUM, LITHOGRAPHY INFORMATION PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD simplified abstract --- WikiPatents{,} ", year = "2023", url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_18187082._LITHOGRAPHY_INFORMATION_PROCESSING_APPARATUS,_LITHOGRAPHY_SYSTEM,_STORAGE_MEDIUM,_LITHOGRAPHY_INFORMATION_PROCESSING_METHOD,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract&oldid=4666}", note = "[Online; accessed 26-June-2024]" }