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Bibliographic details for 18523474. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (SCREEN Holdings Co., Ltd.)

Citation styles for 18523474. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (SCREEN Holdings Co., Ltd.)

APA style

18523474. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (SCREEN Holdings Co., Ltd.). (2024, March 25). WikiPatents, . Retrieved 07:54, June 17, 2024 from http://wikipatents.org/index.php?title=18523474._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(SCREEN_Holdings_Co.,_Ltd.)&oldid=44766.

MLA style

"18523474. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (SCREEN Holdings Co., Ltd.)." WikiPatents, . 25 Mar 2024, 08:02 UTC. 17 Jun 2024, 07:54 <http://wikipatents.org/index.php?title=18523474._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(SCREEN_Holdings_Co.,_Ltd.)&oldid=44766>.

MHRA style

WikiPatents contributors, '18523474. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (SCREEN Holdings Co., Ltd.)', WikiPatents, , 25 March 2024, 08:02 UTC, <http://wikipatents.org/index.php?title=18523474._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(SCREEN_Holdings_Co.,_Ltd.)&oldid=44766> [accessed 17 June 2024]

Chicago style

WikiPatents contributors, "18523474. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (SCREEN Holdings Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18523474._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(SCREEN_Holdings_Co.,_Ltd.)&oldid=44766 (accessed June 17, 2024).

CBE/CSE style

WikiPatents contributors. 18523474. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (SCREEN Holdings Co., Ltd.) [Internet]. WikiPatents, ; 2024 Mar 25, 08:02 UTC [cited 2024 Jun 17]. Available from: http://wikipatents.org/index.php?title=18523474._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(SCREEN_Holdings_Co.,_Ltd.)&oldid=44766.

Bluebook style

18523474. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (SCREEN Holdings Co., Ltd.), http://wikipatents.org/index.php?title=18523474._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(SCREEN_Holdings_Co.,_Ltd.)&oldid=44766 (last visited June 17, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18523474. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (SCREEN Holdings Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18523474._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(SCREEN_Holdings_Co.,_Ltd.)&oldid=44766",
   note = "[Online; accessed 17-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18523474. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (SCREEN Holdings Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18523474._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(SCREEN_Holdings_Co.,_Ltd.)&oldid=44766}",
   note = "[Online; accessed 17-June-2024]"
 }


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