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Bibliographic details for 18463529. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)
- Page name: 18463529. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 25 March 2024 07:22 UTC
- Date retrieved: 26 June 2024 12:26 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18463529._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44562
- Page Version ID: 44562
Citation styles for 18463529. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)
APA style
18463529. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation). (2024, March 25). WikiPatents, . Retrieved 12:26, June 26, 2024 from http://wikipatents.org/index.php?title=18463529._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44562.
MLA style
"18463529. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)." WikiPatents, . 25 Mar 2024, 07:22 UTC. 26 Jun 2024, 12:26 <http://wikipatents.org/index.php?title=18463529._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44562>.
MHRA style
WikiPatents contributors, '18463529. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)', WikiPatents, , 25 March 2024, 07:22 UTC, <http://wikipatents.org/index.php?title=18463529._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44562> [accessed 26 June 2024]
Chicago style
WikiPatents contributors, "18463529. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=18463529._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44562 (accessed June 26, 2024).
CBE/CSE style
WikiPatents contributors. 18463529. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation) [Internet]. WikiPatents, ; 2024 Mar 25, 07:22 UTC [cited 2024 Jun 26]. Available from: http://wikipatents.org/index.php?title=18463529._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44562.
Bluebook style
18463529. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation), http://wikipatents.org/index.php?title=18463529._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44562 (last visited June 26, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "18463529. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=18463529._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44562", note = "[Online; accessed 26-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "18463529. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=18463529._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44562}", note = "[Online; accessed 26-June-2024]" }