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Bibliographic details for 18469687. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)

Citation styles for 18469687. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)

APA style

18469687. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation). (2024, March 25). WikiPatents, . Retrieved 12:55, June 26, 2024 from http://wikipatents.org/index.php?title=18469687._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44561.

MLA style

"18469687. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)." WikiPatents, . 25 Mar 2024, 07:21 UTC. 26 Jun 2024, 12:55 <http://wikipatents.org/index.php?title=18469687._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44561>.

MHRA style

WikiPatents contributors, '18469687. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)', WikiPatents, , 25 March 2024, 07:21 UTC, <http://wikipatents.org/index.php?title=18469687._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44561> [accessed 26 June 2024]

Chicago style

WikiPatents contributors, "18469687. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=18469687._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44561 (accessed June 26, 2024).

CBE/CSE style

WikiPatents contributors. 18469687. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation) [Internet]. WikiPatents, ; 2024 Mar 25, 07:21 UTC [cited 2024 Jun 26]. Available from: http://wikipatents.org/index.php?title=18469687._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44561.

Bluebook style

18469687. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation), http://wikipatents.org/index.php?title=18469687._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44561 (last visited June 26, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18469687. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18469687._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44561",
   note = "[Online; accessed 26-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18469687. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18469687._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44561}",
   note = "[Online; accessed 26-June-2024]"
 }


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