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Bibliographic details for 18226854. SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Kokusai Electric Corporation)
- Page name: 18226854. SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Kokusai Electric Corporation)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 25 March 2024 07:20 UTC
- Date retrieved: 24 September 2024 18:47 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18226854._SUBSTRATE_PROCESSING_METHOD,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44554
- Page Version ID: 44554
Citation styles for 18226854. SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Kokusai Electric Corporation)
APA style
18226854. SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Kokusai Electric Corporation). (2024, March 25). WikiPatents, . Retrieved 18:47, September 24, 2024 from http://wikipatents.org/index.php?title=18226854._SUBSTRATE_PROCESSING_METHOD,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44554.
MLA style
"18226854. SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Kokusai Electric Corporation)." WikiPatents, . 25 Mar 2024, 07:20 UTC. 24 Sep 2024, 18:47 <http://wikipatents.org/index.php?title=18226854._SUBSTRATE_PROCESSING_METHOD,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44554>.
MHRA style
WikiPatents contributors, '18226854. SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Kokusai Electric Corporation)', WikiPatents, , 25 March 2024, 07:20 UTC, <http://wikipatents.org/index.php?title=18226854._SUBSTRATE_PROCESSING_METHOD,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44554> [accessed 24 September 2024]
Chicago style
WikiPatents contributors, "18226854. SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Kokusai Electric Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=18226854._SUBSTRATE_PROCESSING_METHOD,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44554 (accessed September 24, 2024).
CBE/CSE style
WikiPatents contributors. 18226854. SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Kokusai Electric Corporation) [Internet]. WikiPatents, ; 2024 Mar 25, 07:20 UTC [cited 2024 Sep 24]. Available from: http://wikipatents.org/index.php?title=18226854._SUBSTRATE_PROCESSING_METHOD,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44554.
Bluebook style
18226854. SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Kokusai Electric Corporation), http://wikipatents.org/index.php?title=18226854._SUBSTRATE_PROCESSING_METHOD,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44554 (last visited September 24, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "18226854. SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Kokusai Electric Corporation) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=18226854._SUBSTRATE_PROCESSING_METHOD,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44554", note = "[Online; accessed 24-September-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "18226854. SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Kokusai Electric Corporation) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=18226854._SUBSTRATE_PROCESSING_METHOD,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44554}", note = "[Online; accessed 24-September-2024]" }