Cite This Page

Jump to navigation Jump to search

Bibliographic details for 18226854. SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Kokusai Electric Corporation)

Citation styles for 18226854. SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Kokusai Electric Corporation)

APA style

18226854. SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Kokusai Electric Corporation). (2024, March 25). WikiPatents, . Retrieved 23:20, June 19, 2024 from http://wikipatents.org/index.php?title=18226854._SUBSTRATE_PROCESSING_METHOD,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44554.

MLA style

"18226854. SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Kokusai Electric Corporation)." WikiPatents, . 25 Mar 2024, 07:20 UTC. 19 Jun 2024, 23:20 <http://wikipatents.org/index.php?title=18226854._SUBSTRATE_PROCESSING_METHOD,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44554>.

MHRA style

WikiPatents contributors, '18226854. SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Kokusai Electric Corporation)', WikiPatents, , 25 March 2024, 07:20 UTC, <http://wikipatents.org/index.php?title=18226854._SUBSTRATE_PROCESSING_METHOD,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44554> [accessed 19 June 2024]

Chicago style

WikiPatents contributors, "18226854. SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Kokusai Electric Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=18226854._SUBSTRATE_PROCESSING_METHOD,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44554 (accessed June 19, 2024).

CBE/CSE style

WikiPatents contributors. 18226854. SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Kokusai Electric Corporation) [Internet]. WikiPatents, ; 2024 Mar 25, 07:20 UTC [cited 2024 Jun 19]. Available from: http://wikipatents.org/index.php?title=18226854._SUBSTRATE_PROCESSING_METHOD,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44554.

Bluebook style

18226854. SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Kokusai Electric Corporation), http://wikipatents.org/index.php?title=18226854._SUBSTRATE_PROCESSING_METHOD,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44554 (last visited June 19, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18226854. SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Kokusai Electric Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18226854._SUBSTRATE_PROCESSING_METHOD,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44554",
   note = "[Online; accessed 19-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18226854. SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Kokusai Electric Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18226854._SUBSTRATE_PROCESSING_METHOD,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=44554}",
   note = "[Online; accessed 19-June-2024]"
 }


Retrieved from "http://wikipatents.org/index.php?title=Special:CiteThisPage"