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Bibliographic details for 18519519. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED)
- Page name: 18519519. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 25 March 2024 05:17 UTC
- Date retrieved: 17 June 2024 13:47 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18519519._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43940
- Page Version ID: 43940
Citation styles for 18519519. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED)
APA style
18519519. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED). (2024, March 25). WikiPatents, . Retrieved 13:47, June 17, 2024 from http://wikipatents.org/index.php?title=18519519._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43940.
MLA style
"18519519. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED)." WikiPatents, . 25 Mar 2024, 05:17 UTC. 17 Jun 2024, 13:47 <http://wikipatents.org/index.php?title=18519519._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43940>.
MHRA style
WikiPatents contributors, '18519519. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED)', WikiPatents, , 25 March 2024, 05:17 UTC, <http://wikipatents.org/index.php?title=18519519._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43940> [accessed 17 June 2024]
Chicago style
WikiPatents contributors, "18519519. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED)," WikiPatents, , http://wikipatents.org/index.php?title=18519519._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43940 (accessed June 17, 2024).
CBE/CSE style
WikiPatents contributors. 18519519. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED) [Internet]. WikiPatents, ; 2024 Mar 25, 05:17 UTC [cited 2024 Jun 17]. Available from: http://wikipatents.org/index.php?title=18519519._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43940.
Bluebook style
18519519. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED), http://wikipatents.org/index.php?title=18519519._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43940 (last visited June 17, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18519519. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18519519._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43940",
note = "[Online; accessed 17-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18519519. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18519519._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43940}",
note = "[Online; accessed 17-June-2024]"
}
