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Bibliographic details for 17946609. METHODS TO PREVENT SURFACE CHARGE INDUCED CD-DEPENDENT ETCHING OF MATERIAL FORMED WITHIN FEATURES ON A PATTERNED SUBSTRATE simplified abstract (TOKYO ELECTRON LIMITED)

Citation styles for 17946609. METHODS TO PREVENT SURFACE CHARGE INDUCED CD-DEPENDENT ETCHING OF MATERIAL FORMED WITHIN FEATURES ON A PATTERNED SUBSTRATE simplified abstract (TOKYO ELECTRON LIMITED)

APA style

17946609. METHODS TO PREVENT SURFACE CHARGE INDUCED CD-DEPENDENT ETCHING OF MATERIAL FORMED WITHIN FEATURES ON A PATTERNED SUBSTRATE simplified abstract (TOKYO ELECTRON LIMITED). (2024, March 25). WikiPatents, . Retrieved 18:10, September 22, 2024 from http://wikipatents.org/index.php?title=17946609._METHODS_TO_PREVENT_SURFACE_CHARGE_INDUCED_CD-DEPENDENT_ETCHING_OF_MATERIAL_FORMED_WITHIN_FEATURES_ON_A_PATTERNED_SUBSTRATE_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43936.

MLA style

"17946609. METHODS TO PREVENT SURFACE CHARGE INDUCED CD-DEPENDENT ETCHING OF MATERIAL FORMED WITHIN FEATURES ON A PATTERNED SUBSTRATE simplified abstract (TOKYO ELECTRON LIMITED)." WikiPatents, . 25 Mar 2024, 05:16 UTC. 22 Sep 2024, 18:10 <http://wikipatents.org/index.php?title=17946609._METHODS_TO_PREVENT_SURFACE_CHARGE_INDUCED_CD-DEPENDENT_ETCHING_OF_MATERIAL_FORMED_WITHIN_FEATURES_ON_A_PATTERNED_SUBSTRATE_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43936>.

MHRA style

WikiPatents contributors, '17946609. METHODS TO PREVENT SURFACE CHARGE INDUCED CD-DEPENDENT ETCHING OF MATERIAL FORMED WITHIN FEATURES ON A PATTERNED SUBSTRATE simplified abstract (TOKYO ELECTRON LIMITED)', WikiPatents, , 25 March 2024, 05:16 UTC, <http://wikipatents.org/index.php?title=17946609._METHODS_TO_PREVENT_SURFACE_CHARGE_INDUCED_CD-DEPENDENT_ETCHING_OF_MATERIAL_FORMED_WITHIN_FEATURES_ON_A_PATTERNED_SUBSTRATE_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43936> [accessed 22 September 2024]

Chicago style

WikiPatents contributors, "17946609. METHODS TO PREVENT SURFACE CHARGE INDUCED CD-DEPENDENT ETCHING OF MATERIAL FORMED WITHIN FEATURES ON A PATTERNED SUBSTRATE simplified abstract (TOKYO ELECTRON LIMITED)," WikiPatents, , http://wikipatents.org/index.php?title=17946609._METHODS_TO_PREVENT_SURFACE_CHARGE_INDUCED_CD-DEPENDENT_ETCHING_OF_MATERIAL_FORMED_WITHIN_FEATURES_ON_A_PATTERNED_SUBSTRATE_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43936 (accessed September 22, 2024).

CBE/CSE style

WikiPatents contributors. 17946609. METHODS TO PREVENT SURFACE CHARGE INDUCED CD-DEPENDENT ETCHING OF MATERIAL FORMED WITHIN FEATURES ON A PATTERNED SUBSTRATE simplified abstract (TOKYO ELECTRON LIMITED) [Internet]. WikiPatents, ; 2024 Mar 25, 05:16 UTC [cited 2024 Sep 22]. Available from: http://wikipatents.org/index.php?title=17946609._METHODS_TO_PREVENT_SURFACE_CHARGE_INDUCED_CD-DEPENDENT_ETCHING_OF_MATERIAL_FORMED_WITHIN_FEATURES_ON_A_PATTERNED_SUBSTRATE_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43936.

Bluebook style

17946609. METHODS TO PREVENT SURFACE CHARGE INDUCED CD-DEPENDENT ETCHING OF MATERIAL FORMED WITHIN FEATURES ON A PATTERNED SUBSTRATE simplified abstract (TOKYO ELECTRON LIMITED), http://wikipatents.org/index.php?title=17946609._METHODS_TO_PREVENT_SURFACE_CHARGE_INDUCED_CD-DEPENDENT_ETCHING_OF_MATERIAL_FORMED_WITHIN_FEATURES_ON_A_PATTERNED_SUBSTRATE_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43936 (last visited September 22, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17946609. METHODS TO PREVENT SURFACE CHARGE INDUCED CD-DEPENDENT ETCHING OF MATERIAL FORMED WITHIN FEATURES ON A PATTERNED SUBSTRATE simplified abstract (TOKYO ELECTRON LIMITED) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17946609._METHODS_TO_PREVENT_SURFACE_CHARGE_INDUCED_CD-DEPENDENT_ETCHING_OF_MATERIAL_FORMED_WITHIN_FEATURES_ON_A_PATTERNED_SUBSTRATE_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43936",
   note = "[Online; accessed 22-September-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17946609. METHODS TO PREVENT SURFACE CHARGE INDUCED CD-DEPENDENT ETCHING OF MATERIAL FORMED WITHIN FEATURES ON A PATTERNED SUBSTRATE simplified abstract (TOKYO ELECTRON LIMITED) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17946609._METHODS_TO_PREVENT_SURFACE_CHARGE_INDUCED_CD-DEPENDENT_ETCHING_OF_MATERIAL_FORMED_WITHIN_FEATURES_ON_A_PATTERNED_SUBSTRATE_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43936}",
   note = "[Online; accessed 22-September-2024]"
 }


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