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Bibliographic details for 18524767. FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING simplified abstract (TOKYO ELECTRON LIMITED)
- Page name: 18524767. FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING simplified abstract (TOKYO ELECTRON LIMITED)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 25 March 2024 05:15 UTC
- Date retrieved: 22 June 2024 10:57 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18524767._FILM_DEPOSITION_APPARATUS_FOR_FINE_PATTERN_FORMING_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43932
- Page Version ID: 43932
Citation styles for 18524767. FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING simplified abstract (TOKYO ELECTRON LIMITED)
APA style
18524767. FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING simplified abstract (TOKYO ELECTRON LIMITED). (2024, March 25). WikiPatents, . Retrieved 10:57, June 22, 2024 from http://wikipatents.org/index.php?title=18524767._FILM_DEPOSITION_APPARATUS_FOR_FINE_PATTERN_FORMING_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43932.
MLA style
"18524767. FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING simplified abstract (TOKYO ELECTRON LIMITED)." WikiPatents, . 25 Mar 2024, 05:15 UTC. 22 Jun 2024, 10:57 <http://wikipatents.org/index.php?title=18524767._FILM_DEPOSITION_APPARATUS_FOR_FINE_PATTERN_FORMING_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43932>.
MHRA style
WikiPatents contributors, '18524767. FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING simplified abstract (TOKYO ELECTRON LIMITED)', WikiPatents, , 25 March 2024, 05:15 UTC, <http://wikipatents.org/index.php?title=18524767._FILM_DEPOSITION_APPARATUS_FOR_FINE_PATTERN_FORMING_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43932> [accessed 22 June 2024]
Chicago style
WikiPatents contributors, "18524767. FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING simplified abstract (TOKYO ELECTRON LIMITED)," WikiPatents, , http://wikipatents.org/index.php?title=18524767._FILM_DEPOSITION_APPARATUS_FOR_FINE_PATTERN_FORMING_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43932 (accessed June 22, 2024).
CBE/CSE style
WikiPatents contributors. 18524767. FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING simplified abstract (TOKYO ELECTRON LIMITED) [Internet]. WikiPatents, ; 2024 Mar 25, 05:15 UTC [cited 2024 Jun 22]. Available from: http://wikipatents.org/index.php?title=18524767._FILM_DEPOSITION_APPARATUS_FOR_FINE_PATTERN_FORMING_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43932.
Bluebook style
18524767. FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING simplified abstract (TOKYO ELECTRON LIMITED), http://wikipatents.org/index.php?title=18524767._FILM_DEPOSITION_APPARATUS_FOR_FINE_PATTERN_FORMING_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43932 (last visited June 22, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18524767. FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING simplified abstract (TOKYO ELECTRON LIMITED) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18524767._FILM_DEPOSITION_APPARATUS_FOR_FINE_PATTERN_FORMING_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43932",
note = "[Online; accessed 22-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18524767. FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING simplified abstract (TOKYO ELECTRON LIMITED) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18524767._FILM_DEPOSITION_APPARATUS_FOR_FINE_PATTERN_FORMING_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43932}",
note = "[Online; accessed 22-June-2024]"
}
