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Bibliographic details for 18526350. SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED)
- Page name: 18526350. SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 25 March 2024 05:15 UTC
- Date retrieved: 16 June 2024 22:24 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18526350._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43931
- Page Version ID: 43931
Citation styles for 18526350. SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED)
APA style
18526350. SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED). (2024, March 25). WikiPatents, . Retrieved 22:24, June 16, 2024 from http://wikipatents.org/index.php?title=18526350._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43931.
MLA style
"18526350. SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED)." WikiPatents, . 25 Mar 2024, 05:15 UTC. 16 Jun 2024, 22:24 <http://wikipatents.org/index.php?title=18526350._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43931>.
MHRA style
WikiPatents contributors, '18526350. SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED)', WikiPatents, , 25 March 2024, 05:15 UTC, <http://wikipatents.org/index.php?title=18526350._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43931> [accessed 16 June 2024]
Chicago style
WikiPatents contributors, "18526350. SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED)," WikiPatents, , http://wikipatents.org/index.php?title=18526350._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43931 (accessed June 16, 2024).
CBE/CSE style
WikiPatents contributors. 18526350. SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED) [Internet]. WikiPatents, ; 2024 Mar 25, 05:15 UTC [cited 2024 Jun 16]. Available from: http://wikipatents.org/index.php?title=18526350._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43931.
Bluebook style
18526350. SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED), http://wikipatents.org/index.php?title=18526350._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43931 (last visited June 16, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18526350. SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18526350._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43931",
note = "[Online; accessed 16-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18526350. SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18526350._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43931}",
note = "[Online; accessed 16-June-2024]"
}
