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Bibliographic details for 18526350. SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED)
- Page name: 18526350. SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 25 March 2024 05:15 UTC
- Date retrieved: 27 September 2024 14:11 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18526350._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43931
- Page Version ID: 43931
Citation styles for 18526350. SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED)
APA style
18526350. SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED). (2024, March 25). WikiPatents, . Retrieved 14:11, September 27, 2024 from http://wikipatents.org/index.php?title=18526350._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43931.
MLA style
"18526350. SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED)." WikiPatents, . 25 Mar 2024, 05:15 UTC. 27 Sep 2024, 14:11 <http://wikipatents.org/index.php?title=18526350._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43931>.
MHRA style
WikiPatents contributors, '18526350. SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED)', WikiPatents, , 25 March 2024, 05:15 UTC, <http://wikipatents.org/index.php?title=18526350._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43931> [accessed 27 September 2024]
Chicago style
WikiPatents contributors, "18526350. SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED)," WikiPatents, , http://wikipatents.org/index.php?title=18526350._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43931 (accessed September 27, 2024).
CBE/CSE style
WikiPatents contributors. 18526350. SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED) [Internet]. WikiPatents, ; 2024 Mar 25, 05:15 UTC [cited 2024 Sep 27]. Available from: http://wikipatents.org/index.php?title=18526350._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43931.
Bluebook style
18526350. SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED), http://wikipatents.org/index.php?title=18526350._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43931 (last visited September 27, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "18526350. SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=18526350._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43931", note = "[Online; accessed 27-September-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "18526350. SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=18526350._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43931}", note = "[Online; accessed 27-September-2024]" }