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Bibliographic details for 18255407. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (TOKYO ELECTRON LIMITED)
- Page name: 18255407. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (TOKYO ELECTRON LIMITED)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 25 March 2024 05:14 UTC
- Date retrieved: 16 June 2024 05:14 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18255407._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43927
- Page Version ID: 43927
Citation styles for 18255407. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (TOKYO ELECTRON LIMITED)
APA style
18255407. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (TOKYO ELECTRON LIMITED). (2024, March 25). WikiPatents, . Retrieved 05:14, June 16, 2024 from http://wikipatents.org/index.php?title=18255407._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43927.
MLA style
"18255407. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (TOKYO ELECTRON LIMITED)." WikiPatents, . 25 Mar 2024, 05:14 UTC. 16 Jun 2024, 05:14 <http://wikipatents.org/index.php?title=18255407._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43927>.
MHRA style
WikiPatents contributors, '18255407. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (TOKYO ELECTRON LIMITED)', WikiPatents, , 25 March 2024, 05:14 UTC, <http://wikipatents.org/index.php?title=18255407._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43927> [accessed 16 June 2024]
Chicago style
WikiPatents contributors, "18255407. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (TOKYO ELECTRON LIMITED)," WikiPatents, , http://wikipatents.org/index.php?title=18255407._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43927 (accessed June 16, 2024).
CBE/CSE style
WikiPatents contributors. 18255407. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (TOKYO ELECTRON LIMITED) [Internet]. WikiPatents, ; 2024 Mar 25, 05:14 UTC [cited 2024 Jun 16]. Available from: http://wikipatents.org/index.php?title=18255407._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43927.
Bluebook style
18255407. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (TOKYO ELECTRON LIMITED), http://wikipatents.org/index.php?title=18255407._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43927 (last visited June 16, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18255407. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (TOKYO ELECTRON LIMITED) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18255407._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43927",
note = "[Online; accessed 16-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18255407. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (TOKYO ELECTRON LIMITED) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18255407._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43927}",
note = "[Online; accessed 16-June-2024]"
}
