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Bibliographic details for 18255407. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (TOKYO ELECTRON LIMITED)
- Page name: 18255407. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (TOKYO ELECTRON LIMITED)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 25 March 2024 05:14 UTC
- Date retrieved: 24 September 2024 18:47 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18255407._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43927
- Page Version ID: 43927
Citation styles for 18255407. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (TOKYO ELECTRON LIMITED)
APA style
18255407. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (TOKYO ELECTRON LIMITED). (2024, March 25). WikiPatents, . Retrieved 18:47, September 24, 2024 from http://wikipatents.org/index.php?title=18255407._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43927.
MLA style
"18255407. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (TOKYO ELECTRON LIMITED)." WikiPatents, . 25 Mar 2024, 05:14 UTC. 24 Sep 2024, 18:47 <http://wikipatents.org/index.php?title=18255407._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43927>.
MHRA style
WikiPatents contributors, '18255407. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (TOKYO ELECTRON LIMITED)', WikiPatents, , 25 March 2024, 05:14 UTC, <http://wikipatents.org/index.php?title=18255407._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43927> [accessed 24 September 2024]
Chicago style
WikiPatents contributors, "18255407. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (TOKYO ELECTRON LIMITED)," WikiPatents, , http://wikipatents.org/index.php?title=18255407._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43927 (accessed September 24, 2024).
CBE/CSE style
WikiPatents contributors. 18255407. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (TOKYO ELECTRON LIMITED) [Internet]. WikiPatents, ; 2024 Mar 25, 05:14 UTC [cited 2024 Sep 24]. Available from: http://wikipatents.org/index.php?title=18255407._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43927.
Bluebook style
18255407. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (TOKYO ELECTRON LIMITED), http://wikipatents.org/index.php?title=18255407._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43927 (last visited September 24, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "18255407. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (TOKYO ELECTRON LIMITED) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=18255407._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43927", note = "[Online; accessed 24-September-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "18255407. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (TOKYO ELECTRON LIMITED) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=18255407._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43927}", note = "[Online; accessed 24-September-2024]" }