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Bibliographic details for 18520369. IN-SITU ETCH MATERIAL SELECTIVITY DETECTION SYSTEM simplified abstract (Applied Materials, Inc.)
- Page name: 18520369. IN-SITU ETCH MATERIAL SELECTIVITY DETECTION SYSTEM simplified abstract (Applied Materials, Inc.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 25 March 2024 05:00 UTC
- Date retrieved: 23 June 2024 01:55 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18520369._IN-SITU_ETCH_MATERIAL_SELECTIVITY_DETECTION_SYSTEM_simplified_abstract_(Applied_Materials,_Inc.)&oldid=43860
- Page Version ID: 43860
Citation styles for 18520369. IN-SITU ETCH MATERIAL SELECTIVITY DETECTION SYSTEM simplified abstract (Applied Materials, Inc.)
APA style
18520369. IN-SITU ETCH MATERIAL SELECTIVITY DETECTION SYSTEM simplified abstract (Applied Materials, Inc.). (2024, March 25). WikiPatents, . Retrieved 01:55, June 23, 2024 from http://wikipatents.org/index.php?title=18520369._IN-SITU_ETCH_MATERIAL_SELECTIVITY_DETECTION_SYSTEM_simplified_abstract_(Applied_Materials,_Inc.)&oldid=43860.
MLA style
"18520369. IN-SITU ETCH MATERIAL SELECTIVITY DETECTION SYSTEM simplified abstract (Applied Materials, Inc.)." WikiPatents, . 25 Mar 2024, 05:00 UTC. 23 Jun 2024, 01:55 <http://wikipatents.org/index.php?title=18520369._IN-SITU_ETCH_MATERIAL_SELECTIVITY_DETECTION_SYSTEM_simplified_abstract_(Applied_Materials,_Inc.)&oldid=43860>.
MHRA style
WikiPatents contributors, '18520369. IN-SITU ETCH MATERIAL SELECTIVITY DETECTION SYSTEM simplified abstract (Applied Materials, Inc.)', WikiPatents, , 25 March 2024, 05:00 UTC, <http://wikipatents.org/index.php?title=18520369._IN-SITU_ETCH_MATERIAL_SELECTIVITY_DETECTION_SYSTEM_simplified_abstract_(Applied_Materials,_Inc.)&oldid=43860> [accessed 23 June 2024]
Chicago style
WikiPatents contributors, "18520369. IN-SITU ETCH MATERIAL SELECTIVITY DETECTION SYSTEM simplified abstract (Applied Materials, Inc.)," WikiPatents, , http://wikipatents.org/index.php?title=18520369._IN-SITU_ETCH_MATERIAL_SELECTIVITY_DETECTION_SYSTEM_simplified_abstract_(Applied_Materials,_Inc.)&oldid=43860 (accessed June 23, 2024).
CBE/CSE style
WikiPatents contributors. 18520369. IN-SITU ETCH MATERIAL SELECTIVITY DETECTION SYSTEM simplified abstract (Applied Materials, Inc.) [Internet]. WikiPatents, ; 2024 Mar 25, 05:00 UTC [cited 2024 Jun 23]. Available from: http://wikipatents.org/index.php?title=18520369._IN-SITU_ETCH_MATERIAL_SELECTIVITY_DETECTION_SYSTEM_simplified_abstract_(Applied_Materials,_Inc.)&oldid=43860.
Bluebook style
18520369. IN-SITU ETCH MATERIAL SELECTIVITY DETECTION SYSTEM simplified abstract (Applied Materials, Inc.), http://wikipatents.org/index.php?title=18520369._IN-SITU_ETCH_MATERIAL_SELECTIVITY_DETECTION_SYSTEM_simplified_abstract_(Applied_Materials,_Inc.)&oldid=43860 (last visited June 23, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18520369. IN-SITU ETCH MATERIAL SELECTIVITY DETECTION SYSTEM simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18520369._IN-SITU_ETCH_MATERIAL_SELECTIVITY_DETECTION_SYSTEM_simplified_abstract_(Applied_Materials,_Inc.)&oldid=43860",
note = "[Online; accessed 23-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18520369. IN-SITU ETCH MATERIAL SELECTIVITY DETECTION SYSTEM simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18520369._IN-SITU_ETCH_MATERIAL_SELECTIVITY_DETECTION_SYSTEM_simplified_abstract_(Applied_Materials,_Inc.)&oldid=43860}",
note = "[Online; accessed 23-June-2024]"
}
