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Bibliographic details for 18523394. SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION simplified abstract (Applied Materials, Inc.)
- Page name: 18523394. SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION simplified abstract (Applied Materials, Inc.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 25 March 2024 04:59 UTC
- Date retrieved: 20 June 2024 07:37 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18523394._SINGLE_WAFER_PROCESSING_ENVIRONMENTS_WITH_SPATIAL_SEPARATION_simplified_abstract_(Applied_Materials,_Inc.)&oldid=43859
- Page Version ID: 43859
Citation styles for 18523394. SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION simplified abstract (Applied Materials, Inc.)
APA style
18523394. SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION simplified abstract (Applied Materials, Inc.). (2024, March 25). WikiPatents, . Retrieved 07:37, June 20, 2024 from http://wikipatents.org/index.php?title=18523394._SINGLE_WAFER_PROCESSING_ENVIRONMENTS_WITH_SPATIAL_SEPARATION_simplified_abstract_(Applied_Materials,_Inc.)&oldid=43859.
MLA style
"18523394. SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION simplified abstract (Applied Materials, Inc.)." WikiPatents, . 25 Mar 2024, 04:59 UTC. 20 Jun 2024, 07:37 <http://wikipatents.org/index.php?title=18523394._SINGLE_WAFER_PROCESSING_ENVIRONMENTS_WITH_SPATIAL_SEPARATION_simplified_abstract_(Applied_Materials,_Inc.)&oldid=43859>.
MHRA style
WikiPatents contributors, '18523394. SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION simplified abstract (Applied Materials, Inc.)', WikiPatents, , 25 March 2024, 04:59 UTC, <http://wikipatents.org/index.php?title=18523394._SINGLE_WAFER_PROCESSING_ENVIRONMENTS_WITH_SPATIAL_SEPARATION_simplified_abstract_(Applied_Materials,_Inc.)&oldid=43859> [accessed 20 June 2024]
Chicago style
WikiPatents contributors, "18523394. SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION simplified abstract (Applied Materials, Inc.)," WikiPatents, , http://wikipatents.org/index.php?title=18523394._SINGLE_WAFER_PROCESSING_ENVIRONMENTS_WITH_SPATIAL_SEPARATION_simplified_abstract_(Applied_Materials,_Inc.)&oldid=43859 (accessed June 20, 2024).
CBE/CSE style
WikiPatents contributors. 18523394. SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION simplified abstract (Applied Materials, Inc.) [Internet]. WikiPatents, ; 2024 Mar 25, 04:59 UTC [cited 2024 Jun 20]. Available from: http://wikipatents.org/index.php?title=18523394._SINGLE_WAFER_PROCESSING_ENVIRONMENTS_WITH_SPATIAL_SEPARATION_simplified_abstract_(Applied_Materials,_Inc.)&oldid=43859.
Bluebook style
18523394. SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION simplified abstract (Applied Materials, Inc.), http://wikipatents.org/index.php?title=18523394._SINGLE_WAFER_PROCESSING_ENVIRONMENTS_WITH_SPATIAL_SEPARATION_simplified_abstract_(Applied_Materials,_Inc.)&oldid=43859 (last visited June 20, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18523394. SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18523394._SINGLE_WAFER_PROCESSING_ENVIRONMENTS_WITH_SPATIAL_SEPARATION_simplified_abstract_(Applied_Materials,_Inc.)&oldid=43859",
note = "[Online; accessed 20-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18523394. SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18523394._SINGLE_WAFER_PROCESSING_ENVIRONMENTS_WITH_SPATIAL_SEPARATION_simplified_abstract_(Applied_Materials,_Inc.)&oldid=43859}",
note = "[Online; accessed 20-June-2024]"
}
