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Bibliographic details for 18522056. SCANDIUM PRECURSOR FOR SC2O3 OR SC2S3 ATOMIC LAYER DEPOSITION simplified abstract (Intel Corporation)
- Page name: 18522056. SCANDIUM PRECURSOR FOR SC2O3 OR SC2S3 ATOMIC LAYER DEPOSITION simplified abstract (Intel Corporation)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 25 March 2024 03:33 UTC
- Date retrieved: 16 June 2024 10:56 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18522056._SCANDIUM_PRECURSOR_FOR_SC2O3_OR_SC2S3_ATOMIC_LAYER_DEPOSITION_simplified_abstract_(Intel_Corporation)&oldid=43429
- Page Version ID: 43429
Citation styles for 18522056. SCANDIUM PRECURSOR FOR SC2O3 OR SC2S3 ATOMIC LAYER DEPOSITION simplified abstract (Intel Corporation)
APA style
18522056. SCANDIUM PRECURSOR FOR SC2O3 OR SC2S3 ATOMIC LAYER DEPOSITION simplified abstract (Intel Corporation). (2024, March 25). WikiPatents, . Retrieved 10:56, June 16, 2024 from http://wikipatents.org/index.php?title=18522056._SCANDIUM_PRECURSOR_FOR_SC2O3_OR_SC2S3_ATOMIC_LAYER_DEPOSITION_simplified_abstract_(Intel_Corporation)&oldid=43429.
MLA style
"18522056. SCANDIUM PRECURSOR FOR SC2O3 OR SC2S3 ATOMIC LAYER DEPOSITION simplified abstract (Intel Corporation)." WikiPatents, . 25 Mar 2024, 03:33 UTC. 16 Jun 2024, 10:56 <http://wikipatents.org/index.php?title=18522056._SCANDIUM_PRECURSOR_FOR_SC2O3_OR_SC2S3_ATOMIC_LAYER_DEPOSITION_simplified_abstract_(Intel_Corporation)&oldid=43429>.
MHRA style
WikiPatents contributors, '18522056. SCANDIUM PRECURSOR FOR SC2O3 OR SC2S3 ATOMIC LAYER DEPOSITION simplified abstract (Intel Corporation)', WikiPatents, , 25 March 2024, 03:33 UTC, <http://wikipatents.org/index.php?title=18522056._SCANDIUM_PRECURSOR_FOR_SC2O3_OR_SC2S3_ATOMIC_LAYER_DEPOSITION_simplified_abstract_(Intel_Corporation)&oldid=43429> [accessed 16 June 2024]
Chicago style
WikiPatents contributors, "18522056. SCANDIUM PRECURSOR FOR SC2O3 OR SC2S3 ATOMIC LAYER DEPOSITION simplified abstract (Intel Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=18522056._SCANDIUM_PRECURSOR_FOR_SC2O3_OR_SC2S3_ATOMIC_LAYER_DEPOSITION_simplified_abstract_(Intel_Corporation)&oldid=43429 (accessed June 16, 2024).
CBE/CSE style
WikiPatents contributors. 18522056. SCANDIUM PRECURSOR FOR SC2O3 OR SC2S3 ATOMIC LAYER DEPOSITION simplified abstract (Intel Corporation) [Internet]. WikiPatents, ; 2024 Mar 25, 03:33 UTC [cited 2024 Jun 16]. Available from: http://wikipatents.org/index.php?title=18522056._SCANDIUM_PRECURSOR_FOR_SC2O3_OR_SC2S3_ATOMIC_LAYER_DEPOSITION_simplified_abstract_(Intel_Corporation)&oldid=43429.
Bluebook style
18522056. SCANDIUM PRECURSOR FOR SC2O3 OR SC2S3 ATOMIC LAYER DEPOSITION simplified abstract (Intel Corporation), http://wikipatents.org/index.php?title=18522056._SCANDIUM_PRECURSOR_FOR_SC2O3_OR_SC2S3_ATOMIC_LAYER_DEPOSITION_simplified_abstract_(Intel_Corporation)&oldid=43429 (last visited June 16, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "18522056. SCANDIUM PRECURSOR FOR SC2O3 OR SC2S3 ATOMIC LAYER DEPOSITION simplified abstract (Intel Corporation) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=18522056._SCANDIUM_PRECURSOR_FOR_SC2O3_OR_SC2S3_ATOMIC_LAYER_DEPOSITION_simplified_abstract_(Intel_Corporation)&oldid=43429", note = "[Online; accessed 16-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "18522056. SCANDIUM PRECURSOR FOR SC2O3 OR SC2S3 ATOMIC LAYER DEPOSITION simplified abstract (Intel Corporation) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=18522056._SCANDIUM_PRECURSOR_FOR_SC2O3_OR_SC2S3_ATOMIC_LAYER_DEPOSITION_simplified_abstract_(Intel_Corporation)&oldid=43429}", note = "[Online; accessed 16-June-2024]" }