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Bibliographic details for 18469619. SUBSTRATE TREATMENT APPARATUS AND METHOD FOR TREATING SUBSTRATE simplified abstract (Kioxia Corporation)
- Page name: 18469619. SUBSTRATE TREATMENT APPARATUS AND METHOD FOR TREATING SUBSTRATE simplified abstract (Kioxia Corporation)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 22 March 2024 09:01 UTC
- Date retrieved: 26 June 2024 11:56 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18469619._SUBSTRATE_TREATMENT_APPARATUS_AND_METHOD_FOR_TREATING_SUBSTRATE_simplified_abstract_(Kioxia_Corporation)&oldid=42020
- Page Version ID: 42020
Citation styles for 18469619. SUBSTRATE TREATMENT APPARATUS AND METHOD FOR TREATING SUBSTRATE simplified abstract (Kioxia Corporation)
APA style
18469619. SUBSTRATE TREATMENT APPARATUS AND METHOD FOR TREATING SUBSTRATE simplified abstract (Kioxia Corporation). (2024, March 22). WikiPatents, . Retrieved 11:56, June 26, 2024 from http://wikipatents.org/index.php?title=18469619._SUBSTRATE_TREATMENT_APPARATUS_AND_METHOD_FOR_TREATING_SUBSTRATE_simplified_abstract_(Kioxia_Corporation)&oldid=42020.
MLA style
"18469619. SUBSTRATE TREATMENT APPARATUS AND METHOD FOR TREATING SUBSTRATE simplified abstract (Kioxia Corporation)." WikiPatents, . 22 Mar 2024, 09:01 UTC. 26 Jun 2024, 11:56 <http://wikipatents.org/index.php?title=18469619._SUBSTRATE_TREATMENT_APPARATUS_AND_METHOD_FOR_TREATING_SUBSTRATE_simplified_abstract_(Kioxia_Corporation)&oldid=42020>.
MHRA style
WikiPatents contributors, '18469619. SUBSTRATE TREATMENT APPARATUS AND METHOD FOR TREATING SUBSTRATE simplified abstract (Kioxia Corporation)', WikiPatents, , 22 March 2024, 09:01 UTC, <http://wikipatents.org/index.php?title=18469619._SUBSTRATE_TREATMENT_APPARATUS_AND_METHOD_FOR_TREATING_SUBSTRATE_simplified_abstract_(Kioxia_Corporation)&oldid=42020> [accessed 26 June 2024]
Chicago style
WikiPatents contributors, "18469619. SUBSTRATE TREATMENT APPARATUS AND METHOD FOR TREATING SUBSTRATE simplified abstract (Kioxia Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=18469619._SUBSTRATE_TREATMENT_APPARATUS_AND_METHOD_FOR_TREATING_SUBSTRATE_simplified_abstract_(Kioxia_Corporation)&oldid=42020 (accessed June 26, 2024).
CBE/CSE style
WikiPatents contributors. 18469619. SUBSTRATE TREATMENT APPARATUS AND METHOD FOR TREATING SUBSTRATE simplified abstract (Kioxia Corporation) [Internet]. WikiPatents, ; 2024 Mar 22, 09:01 UTC [cited 2024 Jun 26]. Available from: http://wikipatents.org/index.php?title=18469619._SUBSTRATE_TREATMENT_APPARATUS_AND_METHOD_FOR_TREATING_SUBSTRATE_simplified_abstract_(Kioxia_Corporation)&oldid=42020.
Bluebook style
18469619. SUBSTRATE TREATMENT APPARATUS AND METHOD FOR TREATING SUBSTRATE simplified abstract (Kioxia Corporation), http://wikipatents.org/index.php?title=18469619._SUBSTRATE_TREATMENT_APPARATUS_AND_METHOD_FOR_TREATING_SUBSTRATE_simplified_abstract_(Kioxia_Corporation)&oldid=42020 (last visited June 26, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18469619. SUBSTRATE TREATMENT APPARATUS AND METHOD FOR TREATING SUBSTRATE simplified abstract (Kioxia Corporation) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18469619._SUBSTRATE_TREATMENT_APPARATUS_AND_METHOD_FOR_TREATING_SUBSTRATE_simplified_abstract_(Kioxia_Corporation)&oldid=42020",
note = "[Online; accessed 26-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18469619. SUBSTRATE TREATMENT APPARATUS AND METHOD FOR TREATING SUBSTRATE simplified abstract (Kioxia Corporation) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18469619._SUBSTRATE_TREATMENT_APPARATUS_AND_METHOD_FOR_TREATING_SUBSTRATE_simplified_abstract_(Kioxia_Corporation)&oldid=42020}",
note = "[Online; accessed 26-June-2024]"
}
