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Bibliographic details for 17933861. SELF-ALIGNED BACKSIDE CONTACT WITH DEEP TRENCH LAST FLOW simplified abstract (International Business Machines Corporation)

Citation styles for 17933861. SELF-ALIGNED BACKSIDE CONTACT WITH DEEP TRENCH LAST FLOW simplified abstract (International Business Machines Corporation)

APA style

17933861. SELF-ALIGNED BACKSIDE CONTACT WITH DEEP TRENCH LAST FLOW simplified abstract (International Business Machines Corporation). (2024, March 22). WikiPatents, . Retrieved 03:58, June 26, 2024 from http://wikipatents.org/index.php?title=17933861._SELF-ALIGNED_BACKSIDE_CONTACT_WITH_DEEP_TRENCH_LAST_FLOW_simplified_abstract_(International_Business_Machines_Corporation)&oldid=41923.

MLA style

"17933861. SELF-ALIGNED BACKSIDE CONTACT WITH DEEP TRENCH LAST FLOW simplified abstract (International Business Machines Corporation)." WikiPatents, . 22 Mar 2024, 08:45 UTC. 26 Jun 2024, 03:58 <http://wikipatents.org/index.php?title=17933861._SELF-ALIGNED_BACKSIDE_CONTACT_WITH_DEEP_TRENCH_LAST_FLOW_simplified_abstract_(International_Business_Machines_Corporation)&oldid=41923>.

MHRA style

WikiPatents contributors, '17933861. SELF-ALIGNED BACKSIDE CONTACT WITH DEEP TRENCH LAST FLOW simplified abstract (International Business Machines Corporation)', WikiPatents, , 22 March 2024, 08:45 UTC, <http://wikipatents.org/index.php?title=17933861._SELF-ALIGNED_BACKSIDE_CONTACT_WITH_DEEP_TRENCH_LAST_FLOW_simplified_abstract_(International_Business_Machines_Corporation)&oldid=41923> [accessed 26 June 2024]

Chicago style

WikiPatents contributors, "17933861. SELF-ALIGNED BACKSIDE CONTACT WITH DEEP TRENCH LAST FLOW simplified abstract (International Business Machines Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=17933861._SELF-ALIGNED_BACKSIDE_CONTACT_WITH_DEEP_TRENCH_LAST_FLOW_simplified_abstract_(International_Business_Machines_Corporation)&oldid=41923 (accessed June 26, 2024).

CBE/CSE style

WikiPatents contributors. 17933861. SELF-ALIGNED BACKSIDE CONTACT WITH DEEP TRENCH LAST FLOW simplified abstract (International Business Machines Corporation) [Internet]. WikiPatents, ; 2024 Mar 22, 08:45 UTC [cited 2024 Jun 26]. Available from: http://wikipatents.org/index.php?title=17933861._SELF-ALIGNED_BACKSIDE_CONTACT_WITH_DEEP_TRENCH_LAST_FLOW_simplified_abstract_(International_Business_Machines_Corporation)&oldid=41923.

Bluebook style

17933861. SELF-ALIGNED BACKSIDE CONTACT WITH DEEP TRENCH LAST FLOW simplified abstract (International Business Machines Corporation), http://wikipatents.org/index.php?title=17933861._SELF-ALIGNED_BACKSIDE_CONTACT_WITH_DEEP_TRENCH_LAST_FLOW_simplified_abstract_(International_Business_Machines_Corporation)&oldid=41923 (last visited June 26, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17933861. SELF-ALIGNED BACKSIDE CONTACT WITH DEEP TRENCH LAST FLOW simplified abstract (International Business Machines Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17933861._SELF-ALIGNED_BACKSIDE_CONTACT_WITH_DEEP_TRENCH_LAST_FLOW_simplified_abstract_(International_Business_Machines_Corporation)&oldid=41923",
   note = "[Online; accessed 26-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17933861. SELF-ALIGNED BACKSIDE CONTACT WITH DEEP TRENCH LAST FLOW simplified abstract (International Business Machines Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17933861._SELF-ALIGNED_BACKSIDE_CONTACT_WITH_DEEP_TRENCH_LAST_FLOW_simplified_abstract_(International_Business_Machines_Corporation)&oldid=41923}",
   note = "[Online; accessed 26-June-2024]"
 }


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