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Bibliographic details for 18136070. EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

Citation styles for 18136070. EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

APA style

18136070. EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.). (2024, March 22). WikiPatents, . Retrieved 11:45, June 20, 2024 from http://wikipatents.org/index.php?title=18136070._EDGE_RING,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=41199.

MLA style

"18136070. EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 22 Mar 2024, 06:19 UTC. 20 Jun 2024, 11:45 <http://wikipatents.org/index.php?title=18136070._EDGE_RING,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=41199>.

MHRA style

WikiPatents contributors, '18136070. EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 22 March 2024, 06:19 UTC, <http://wikipatents.org/index.php?title=18136070._EDGE_RING,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=41199> [accessed 20 June 2024]

Chicago style

WikiPatents contributors, "18136070. EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18136070._EDGE_RING,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=41199 (accessed June 20, 2024).

CBE/CSE style

WikiPatents contributors. 18136070. EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 Mar 22, 06:19 UTC [cited 2024 Jun 20]. Available from: http://wikipatents.org/index.php?title=18136070._EDGE_RING,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=41199.

Bluebook style

18136070. EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=18136070._EDGE_RING,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=41199 (last visited June 20, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18136070. EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18136070._EDGE_RING,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=41199",
   note = "[Online; accessed 20-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18136070. EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18136070._EDGE_RING,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=41199}",
   note = "[Online; accessed 20-June-2024]"
 }


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