Cite This Page
Bibliographic details for Samsung electronics co., ltd. (20240093368). EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract
- Page name: Samsung electronics co., ltd. (20240093368). EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 21 March 2024 09:17 UTC
- Date retrieved: 27 June 2024 23:42 UTC
- Permanent URL: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240093368)._EDGE_RING,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract&oldid=39959
- Page Version ID: 39959
Citation styles for Samsung electronics co., ltd. (20240093368). EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract
APA style
Samsung electronics co., ltd. (20240093368). EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract. (2024, March 21). WikiPatents, . Retrieved 23:42, June 27, 2024 from http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240093368)._EDGE_RING,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract&oldid=39959.
MLA style
"Samsung electronics co., ltd. (20240093368). EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract." WikiPatents, . 21 Mar 2024, 09:17 UTC. 27 Jun 2024, 23:42 <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240093368)._EDGE_RING,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract&oldid=39959>.
MHRA style
WikiPatents contributors, 'Samsung electronics co., ltd. (20240093368). EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract', WikiPatents, , 21 March 2024, 09:17 UTC, <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240093368)._EDGE_RING,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract&oldid=39959> [accessed 27 June 2024]
Chicago style
WikiPatents contributors, "Samsung electronics co., ltd. (20240093368). EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240093368)._EDGE_RING,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract&oldid=39959 (accessed June 27, 2024).
CBE/CSE style
WikiPatents contributors. Samsung electronics co., ltd. (20240093368). EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract [Internet]. WikiPatents, ; 2024 Mar 21, 09:17 UTC [cited 2024 Jun 27]. Available from: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240093368)._EDGE_RING,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract&oldid=39959.
Bluebook style
Samsung electronics co., ltd. (20240093368). EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract, http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240093368)._EDGE_RING,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract&oldid=39959 (last visited June 27, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "Samsung electronics co., ltd. (20240093368). EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240093368)._EDGE_RING,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract&oldid=39959", note = "[Online; accessed 27-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "Samsung electronics co., ltd. (20240093368). EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240093368)._EDGE_RING,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract&oldid=39959}", note = "[Online; accessed 27-June-2024]" }