Cite This Page

Jump to navigation Jump to search

Bibliographic details for 20240085812.SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD simplified abstract (samsung electronics co., ltd.)

Citation styles for 20240085812.SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD simplified abstract (samsung electronics co., ltd.)

APA style

20240085812.SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD simplified abstract (samsung electronics co., ltd.). (2024, March 20). WikiPatents, . Retrieved 23:09, June 25, 2024 from http://wikipatents.org/index.php?title=20240085812.SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_SYSTEM,_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(samsung_electronics_co.,_ltd.)&oldid=39544.

MLA style

"20240085812.SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD simplified abstract (samsung electronics co., ltd.)." WikiPatents, . 20 Mar 2024, 02:04 UTC. 25 Jun 2024, 23:09 <http://wikipatents.org/index.php?title=20240085812.SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_SYSTEM,_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(samsung_electronics_co.,_ltd.)&oldid=39544>.

MHRA style

WikiPatents contributors, '20240085812.SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD simplified abstract (samsung electronics co., ltd.)', WikiPatents, , 20 March 2024, 02:04 UTC, <http://wikipatents.org/index.php?title=20240085812.SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_SYSTEM,_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(samsung_electronics_co.,_ltd.)&oldid=39544> [accessed 25 June 2024]

Chicago style

WikiPatents contributors, "20240085812.SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD simplified abstract (samsung electronics co., ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=20240085812.SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_SYSTEM,_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(samsung_electronics_co.,_ltd.)&oldid=39544 (accessed June 25, 2024).

CBE/CSE style

WikiPatents contributors. 20240085812.SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD simplified abstract (samsung electronics co., ltd.) [Internet]. WikiPatents, ; 2024 Mar 20, 02:04 UTC [cited 2024 Jun 25]. Available from: http://wikipatents.org/index.php?title=20240085812.SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_SYSTEM,_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(samsung_electronics_co.,_ltd.)&oldid=39544.

Bluebook style

20240085812.SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD simplified abstract (samsung electronics co., ltd.), http://wikipatents.org/index.php?title=20240085812.SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_SYSTEM,_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(samsung_electronics_co.,_ltd.)&oldid=39544 (last visited June 25, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "20240085812.SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD simplified abstract (samsung electronics co., ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=20240085812.SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_SYSTEM,_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(samsung_electronics_co.,_ltd.)&oldid=39544",
   note = "[Online; accessed 25-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "20240085812.SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD simplified abstract (samsung electronics co., ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=20240085812.SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_SYSTEM,_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(samsung_electronics_co.,_ltd.)&oldid=39544}",
   note = "[Online; accessed 25-June-2024]"
 }


Retrieved from "http://wikipatents.org/index.php?title=Special:CiteThisPage"