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Bibliographic details for 20240083040.SUBSTRATE PROCESSING DEVICE AND METHOD OF CONTROLLING THE SAME simplified abstract (samsung electronics co., ltd.)
- Page name: 20240083040.SUBSTRATE PROCESSING DEVICE AND METHOD OF CONTROLLING THE SAME simplified abstract (samsung electronics co., ltd.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 20 March 2024 02:00 UTC
- Date retrieved: 28 June 2024 14:41 UTC
- Permanent URL: http://wikipatents.org/index.php?title=20240083040.SUBSTRATE_PROCESSING_DEVICE_AND_METHOD_OF_CONTROLLING_THE_SAME_simplified_abstract_(samsung_electronics_co.,_ltd.)&oldid=39520
- Page Version ID: 39520
Citation styles for 20240083040.SUBSTRATE PROCESSING DEVICE AND METHOD OF CONTROLLING THE SAME simplified abstract (samsung electronics co., ltd.)
APA style
20240083040.SUBSTRATE PROCESSING DEVICE AND METHOD OF CONTROLLING THE SAME simplified abstract (samsung electronics co., ltd.). (2024, March 20). WikiPatents, . Retrieved 14:41, June 28, 2024 from http://wikipatents.org/index.php?title=20240083040.SUBSTRATE_PROCESSING_DEVICE_AND_METHOD_OF_CONTROLLING_THE_SAME_simplified_abstract_(samsung_electronics_co.,_ltd.)&oldid=39520.
MLA style
"20240083040.SUBSTRATE PROCESSING DEVICE AND METHOD OF CONTROLLING THE SAME simplified abstract (samsung electronics co., ltd.)." WikiPatents, . 20 Mar 2024, 02:00 UTC. 28 Jun 2024, 14:41 <http://wikipatents.org/index.php?title=20240083040.SUBSTRATE_PROCESSING_DEVICE_AND_METHOD_OF_CONTROLLING_THE_SAME_simplified_abstract_(samsung_electronics_co.,_ltd.)&oldid=39520>.
MHRA style
WikiPatents contributors, '20240083040.SUBSTRATE PROCESSING DEVICE AND METHOD OF CONTROLLING THE SAME simplified abstract (samsung electronics co., ltd.)', WikiPatents, , 20 March 2024, 02:00 UTC, <http://wikipatents.org/index.php?title=20240083040.SUBSTRATE_PROCESSING_DEVICE_AND_METHOD_OF_CONTROLLING_THE_SAME_simplified_abstract_(samsung_electronics_co.,_ltd.)&oldid=39520> [accessed 28 June 2024]
Chicago style
WikiPatents contributors, "20240083040.SUBSTRATE PROCESSING DEVICE AND METHOD OF CONTROLLING THE SAME simplified abstract (samsung electronics co., ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=20240083040.SUBSTRATE_PROCESSING_DEVICE_AND_METHOD_OF_CONTROLLING_THE_SAME_simplified_abstract_(samsung_electronics_co.,_ltd.)&oldid=39520 (accessed June 28, 2024).
CBE/CSE style
WikiPatents contributors. 20240083040.SUBSTRATE PROCESSING DEVICE AND METHOD OF CONTROLLING THE SAME simplified abstract (samsung electronics co., ltd.) [Internet]. WikiPatents, ; 2024 Mar 20, 02:00 UTC [cited 2024 Jun 28]. Available from: http://wikipatents.org/index.php?title=20240083040.SUBSTRATE_PROCESSING_DEVICE_AND_METHOD_OF_CONTROLLING_THE_SAME_simplified_abstract_(samsung_electronics_co.,_ltd.)&oldid=39520.
Bluebook style
20240083040.SUBSTRATE PROCESSING DEVICE AND METHOD OF CONTROLLING THE SAME simplified abstract (samsung electronics co., ltd.), http://wikipatents.org/index.php?title=20240083040.SUBSTRATE_PROCESSING_DEVICE_AND_METHOD_OF_CONTROLLING_THE_SAME_simplified_abstract_(samsung_electronics_co.,_ltd.)&oldid=39520 (last visited June 28, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "20240083040.SUBSTRATE PROCESSING DEVICE AND METHOD OF CONTROLLING THE SAME simplified abstract (samsung electronics co., ltd.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=20240083040.SUBSTRATE_PROCESSING_DEVICE_AND_METHOD_OF_CONTROLLING_THE_SAME_simplified_abstract_(samsung_electronics_co.,_ltd.)&oldid=39520", note = "[Online; accessed 28-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "20240083040.SUBSTRATE PROCESSING DEVICE AND METHOD OF CONTROLLING THE SAME simplified abstract (samsung electronics co., ltd.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=20240083040.SUBSTRATE_PROCESSING_DEVICE_AND_METHOD_OF_CONTROLLING_THE_SAME_simplified_abstract_(samsung_electronics_co.,_ltd.)&oldid=39520}", note = "[Online; accessed 28-June-2024]" }