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Bibliographic details for 17943815. TARGETED SUB-FIN ETCH DEPTH simplified abstract (Intel Corporation)
- Page name: 17943815. TARGETED SUB-FIN ETCH DEPTH simplified abstract (Intel Corporation)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 17 March 2024 16:27 UTC
- Date retrieved: 28 June 2024 20:52 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17943815._TARGETED_SUB-FIN_ETCH_DEPTH_simplified_abstract_(Intel_Corporation)&oldid=38204
- Page Version ID: 38204
Citation styles for 17943815. TARGETED SUB-FIN ETCH DEPTH simplified abstract (Intel Corporation)
APA style
17943815. TARGETED SUB-FIN ETCH DEPTH simplified abstract (Intel Corporation). (2024, March 17). WikiPatents, . Retrieved 20:52, June 28, 2024 from http://wikipatents.org/index.php?title=17943815._TARGETED_SUB-FIN_ETCH_DEPTH_simplified_abstract_(Intel_Corporation)&oldid=38204.
MLA style
"17943815. TARGETED SUB-FIN ETCH DEPTH simplified abstract (Intel Corporation)." WikiPatents, . 17 Mar 2024, 16:27 UTC. 28 Jun 2024, 20:52 <http://wikipatents.org/index.php?title=17943815._TARGETED_SUB-FIN_ETCH_DEPTH_simplified_abstract_(Intel_Corporation)&oldid=38204>.
MHRA style
WikiPatents contributors, '17943815. TARGETED SUB-FIN ETCH DEPTH simplified abstract (Intel Corporation)', WikiPatents, , 17 March 2024, 16:27 UTC, <http://wikipatents.org/index.php?title=17943815._TARGETED_SUB-FIN_ETCH_DEPTH_simplified_abstract_(Intel_Corporation)&oldid=38204> [accessed 28 June 2024]
Chicago style
WikiPatents contributors, "17943815. TARGETED SUB-FIN ETCH DEPTH simplified abstract (Intel Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=17943815._TARGETED_SUB-FIN_ETCH_DEPTH_simplified_abstract_(Intel_Corporation)&oldid=38204 (accessed June 28, 2024).
CBE/CSE style
WikiPatents contributors. 17943815. TARGETED SUB-FIN ETCH DEPTH simplified abstract (Intel Corporation) [Internet]. WikiPatents, ; 2024 Mar 17, 16:27 UTC [cited 2024 Jun 28]. Available from: http://wikipatents.org/index.php?title=17943815._TARGETED_SUB-FIN_ETCH_DEPTH_simplified_abstract_(Intel_Corporation)&oldid=38204.
Bluebook style
17943815. TARGETED SUB-FIN ETCH DEPTH simplified abstract (Intel Corporation), http://wikipatents.org/index.php?title=17943815._TARGETED_SUB-FIN_ETCH_DEPTH_simplified_abstract_(Intel_Corporation)&oldid=38204 (last visited June 28, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "17943815. TARGETED SUB-FIN ETCH DEPTH simplified abstract (Intel Corporation) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=17943815._TARGETED_SUB-FIN_ETCH_DEPTH_simplified_abstract_(Intel_Corporation)&oldid=38204", note = "[Online; accessed 28-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "17943815. TARGETED SUB-FIN ETCH DEPTH simplified abstract (Intel Corporation) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=17943815._TARGETED_SUB-FIN_ETCH_DEPTH_simplified_abstract_(Intel_Corporation)&oldid=38204}", note = "[Online; accessed 28-June-2024]" }