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Bibliographic details for 18514010. ANTI-OXIDATION LAYER TO PREVENT DIELECTRIC LOSS FROM PLANARIZATION PROCESS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)
- Page name: 18514010. ANTI-OXIDATION LAYER TO PREVENT DIELECTRIC LOSS FROM PLANARIZATION PROCESS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 16 March 2024 23:55 UTC
- Date retrieved: 30 June 2024 12:46 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18514010._ANTI-OXIDATION_LAYER_TO_PREVENT_DIELECTRIC_LOSS_FROM_PLANARIZATION_PROCESS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37374
- Page Version ID: 37374
Citation styles for 18514010. ANTI-OXIDATION LAYER TO PREVENT DIELECTRIC LOSS FROM PLANARIZATION PROCESS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)
APA style
18514010. ANTI-OXIDATION LAYER TO PREVENT DIELECTRIC LOSS FROM PLANARIZATION PROCESS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.). (2024, March 16). WikiPatents, . Retrieved 12:46, June 30, 2024 from http://wikipatents.org/index.php?title=18514010._ANTI-OXIDATION_LAYER_TO_PREVENT_DIELECTRIC_LOSS_FROM_PLANARIZATION_PROCESS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37374.
MLA style
"18514010. ANTI-OXIDATION LAYER TO PREVENT DIELECTRIC LOSS FROM PLANARIZATION PROCESS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)." WikiPatents, . 16 Mar 2024, 23:55 UTC. 30 Jun 2024, 12:46 <http://wikipatents.org/index.php?title=18514010._ANTI-OXIDATION_LAYER_TO_PREVENT_DIELECTRIC_LOSS_FROM_PLANARIZATION_PROCESS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37374>.
MHRA style
WikiPatents contributors, '18514010. ANTI-OXIDATION LAYER TO PREVENT DIELECTRIC LOSS FROM PLANARIZATION PROCESS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)', WikiPatents, , 16 March 2024, 23:55 UTC, <http://wikipatents.org/index.php?title=18514010._ANTI-OXIDATION_LAYER_TO_PREVENT_DIELECTRIC_LOSS_FROM_PLANARIZATION_PROCESS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37374> [accessed 30 June 2024]
Chicago style
WikiPatents contributors, "18514010. ANTI-OXIDATION LAYER TO PREVENT DIELECTRIC LOSS FROM PLANARIZATION PROCESS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18514010._ANTI-OXIDATION_LAYER_TO_PREVENT_DIELECTRIC_LOSS_FROM_PLANARIZATION_PROCESS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37374 (accessed June 30, 2024).
CBE/CSE style
WikiPatents contributors. 18514010. ANTI-OXIDATION LAYER TO PREVENT DIELECTRIC LOSS FROM PLANARIZATION PROCESS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) [Internet]. WikiPatents, ; 2024 Mar 16, 23:55 UTC [cited 2024 Jun 30]. Available from: http://wikipatents.org/index.php?title=18514010._ANTI-OXIDATION_LAYER_TO_PREVENT_DIELECTRIC_LOSS_FROM_PLANARIZATION_PROCESS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37374.
Bluebook style
18514010. ANTI-OXIDATION LAYER TO PREVENT DIELECTRIC LOSS FROM PLANARIZATION PROCESS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.), http://wikipatents.org/index.php?title=18514010._ANTI-OXIDATION_LAYER_TO_PREVENT_DIELECTRIC_LOSS_FROM_PLANARIZATION_PROCESS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37374 (last visited June 30, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "18514010. ANTI-OXIDATION LAYER TO PREVENT DIELECTRIC LOSS FROM PLANARIZATION PROCESS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=18514010._ANTI-OXIDATION_LAYER_TO_PREVENT_DIELECTRIC_LOSS_FROM_PLANARIZATION_PROCESS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37374", note = "[Online; accessed 30-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "18514010. ANTI-OXIDATION LAYER TO PREVENT DIELECTRIC LOSS FROM PLANARIZATION PROCESS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=18514010._ANTI-OXIDATION_LAYER_TO_PREVENT_DIELECTRIC_LOSS_FROM_PLANARIZATION_PROCESS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37374}", note = "[Online; accessed 30-June-2024]" }