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Citation styles for 18514254. MULTI-METAL FILL WITH SELF-ALIGNED PATTERNING AND DIELECTRIC WITH VOIDS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)

APA style

18514254. MULTI-METAL FILL WITH SELF-ALIGNED PATTERNING AND DIELECTRIC WITH VOIDS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.). (2024, March 16). WikiPatents, . Retrieved 14:07, June 17, 2024 from http://wikipatents.org/index.php?title=18514254._MULTI-METAL_FILL_WITH_SELF-ALIGNED_PATTERNING_AND_DIELECTRIC_WITH_VOIDS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37341.

MLA style

"18514254. MULTI-METAL FILL WITH SELF-ALIGNED PATTERNING AND DIELECTRIC WITH VOIDS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)." WikiPatents, . 16 Mar 2024, 23:53 UTC. 17 Jun 2024, 14:07 <http://wikipatents.org/index.php?title=18514254._MULTI-METAL_FILL_WITH_SELF-ALIGNED_PATTERNING_AND_DIELECTRIC_WITH_VOIDS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37341>.

MHRA style

WikiPatents contributors, '18514254. MULTI-METAL FILL WITH SELF-ALIGNED PATTERNING AND DIELECTRIC WITH VOIDS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)', WikiPatents, , 16 March 2024, 23:53 UTC, <http://wikipatents.org/index.php?title=18514254._MULTI-METAL_FILL_WITH_SELF-ALIGNED_PATTERNING_AND_DIELECTRIC_WITH_VOIDS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37341> [accessed 17 June 2024]

Chicago style

WikiPatents contributors, "18514254. MULTI-METAL FILL WITH SELF-ALIGNED PATTERNING AND DIELECTRIC WITH VOIDS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18514254._MULTI-METAL_FILL_WITH_SELF-ALIGNED_PATTERNING_AND_DIELECTRIC_WITH_VOIDS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37341 (accessed June 17, 2024).

CBE/CSE style

WikiPatents contributors. 18514254. MULTI-METAL FILL WITH SELF-ALIGNED PATTERNING AND DIELECTRIC WITH VOIDS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) [Internet]. WikiPatents, ; 2024 Mar 16, 23:53 UTC [cited 2024 Jun 17]. Available from: http://wikipatents.org/index.php?title=18514254._MULTI-METAL_FILL_WITH_SELF-ALIGNED_PATTERNING_AND_DIELECTRIC_WITH_VOIDS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37341.

Bluebook style

18514254. MULTI-METAL FILL WITH SELF-ALIGNED PATTERNING AND DIELECTRIC WITH VOIDS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.), http://wikipatents.org/index.php?title=18514254._MULTI-METAL_FILL_WITH_SELF-ALIGNED_PATTERNING_AND_DIELECTRIC_WITH_VOIDS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37341 (last visited June 17, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18514254. MULTI-METAL FILL WITH SELF-ALIGNED PATTERNING AND DIELECTRIC WITH VOIDS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18514254._MULTI-METAL_FILL_WITH_SELF-ALIGNED_PATTERNING_AND_DIELECTRIC_WITH_VOIDS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37341",
   note = "[Online; accessed 17-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18514254. MULTI-METAL FILL WITH SELF-ALIGNED PATTERNING AND DIELECTRIC WITH VOIDS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18514254._MULTI-METAL_FILL_WITH_SELF-ALIGNED_PATTERNING_AND_DIELECTRIC_WITH_VOIDS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37341}",
   note = "[Online; accessed 17-June-2024]"
 }