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Bibliographic details for 18514254. MULTI-METAL FILL WITH SELF-ALIGNED PATTERNING AND DIELECTRIC WITH VOIDS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)
- Page name: 18514254. MULTI-METAL FILL WITH SELF-ALIGNED PATTERNING AND DIELECTRIC WITH VOIDS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 16 March 2024 23:53 UTC
- Date retrieved: 26 June 2024 12:36 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18514254._MULTI-METAL_FILL_WITH_SELF-ALIGNED_PATTERNING_AND_DIELECTRIC_WITH_VOIDS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37341
- Page Version ID: 37341
Citation styles for 18514254. MULTI-METAL FILL WITH SELF-ALIGNED PATTERNING AND DIELECTRIC WITH VOIDS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)
APA style
18514254. MULTI-METAL FILL WITH SELF-ALIGNED PATTERNING AND DIELECTRIC WITH VOIDS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.). (2024, March 16). WikiPatents, . Retrieved 12:36, June 26, 2024 from http://wikipatents.org/index.php?title=18514254._MULTI-METAL_FILL_WITH_SELF-ALIGNED_PATTERNING_AND_DIELECTRIC_WITH_VOIDS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37341.
MLA style
"18514254. MULTI-METAL FILL WITH SELF-ALIGNED PATTERNING AND DIELECTRIC WITH VOIDS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)." WikiPatents, . 16 Mar 2024, 23:53 UTC. 26 Jun 2024, 12:36 <http://wikipatents.org/index.php?title=18514254._MULTI-METAL_FILL_WITH_SELF-ALIGNED_PATTERNING_AND_DIELECTRIC_WITH_VOIDS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37341>.
MHRA style
WikiPatents contributors, '18514254. MULTI-METAL FILL WITH SELF-ALIGNED PATTERNING AND DIELECTRIC WITH VOIDS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)', WikiPatents, , 16 March 2024, 23:53 UTC, <http://wikipatents.org/index.php?title=18514254._MULTI-METAL_FILL_WITH_SELF-ALIGNED_PATTERNING_AND_DIELECTRIC_WITH_VOIDS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37341> [accessed 26 June 2024]
Chicago style
WikiPatents contributors, "18514254. MULTI-METAL FILL WITH SELF-ALIGNED PATTERNING AND DIELECTRIC WITH VOIDS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18514254._MULTI-METAL_FILL_WITH_SELF-ALIGNED_PATTERNING_AND_DIELECTRIC_WITH_VOIDS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37341 (accessed June 26, 2024).
CBE/CSE style
WikiPatents contributors. 18514254. MULTI-METAL FILL WITH SELF-ALIGNED PATTERNING AND DIELECTRIC WITH VOIDS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) [Internet]. WikiPatents, ; 2024 Mar 16, 23:53 UTC [cited 2024 Jun 26]. Available from: http://wikipatents.org/index.php?title=18514254._MULTI-METAL_FILL_WITH_SELF-ALIGNED_PATTERNING_AND_DIELECTRIC_WITH_VOIDS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37341.
Bluebook style
18514254. MULTI-METAL FILL WITH SELF-ALIGNED PATTERNING AND DIELECTRIC WITH VOIDS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.), http://wikipatents.org/index.php?title=18514254._MULTI-METAL_FILL_WITH_SELF-ALIGNED_PATTERNING_AND_DIELECTRIC_WITH_VOIDS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37341 (last visited June 26, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "18514254. MULTI-METAL FILL WITH SELF-ALIGNED PATTERNING AND DIELECTRIC WITH VOIDS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=18514254._MULTI-METAL_FILL_WITH_SELF-ALIGNED_PATTERNING_AND_DIELECTRIC_WITH_VOIDS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37341", note = "[Online; accessed 26-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "18514254. MULTI-METAL FILL WITH SELF-ALIGNED PATTERNING AND DIELECTRIC WITH VOIDS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=18514254._MULTI-METAL_FILL_WITH_SELF-ALIGNED_PATTERNING_AND_DIELECTRIC_WITH_VOIDS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=37341}", note = "[Online; accessed 26-June-2024]" }