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Bibliographic details for 18504007. WAFER CHUCK, METHOD FOR PRODUCING THE SAME, AND EXPOSURE APPARATUS simplified abstract (CANON KABUSHIKI KAISHA)

Citation styles for 18504007. WAFER CHUCK, METHOD FOR PRODUCING THE SAME, AND EXPOSURE APPARATUS simplified abstract (CANON KABUSHIKI KAISHA)

APA style

18504007. WAFER CHUCK, METHOD FOR PRODUCING THE SAME, AND EXPOSURE APPARATUS simplified abstract (CANON KABUSHIKI KAISHA). (2024, March 4). WikiPatents, . Retrieved 02:50, June 28, 2024 from http://wikipatents.org/index.php?title=18504007._WAFER_CHUCK,_METHOD_FOR_PRODUCING_THE_SAME,_AND_EXPOSURE_APPARATUS_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=36646.

MLA style

"18504007. WAFER CHUCK, METHOD FOR PRODUCING THE SAME, AND EXPOSURE APPARATUS simplified abstract (CANON KABUSHIKI KAISHA)." WikiPatents, . 4 Mar 2024, 05:28 UTC. 28 Jun 2024, 02:50 <http://wikipatents.org/index.php?title=18504007._WAFER_CHUCK,_METHOD_FOR_PRODUCING_THE_SAME,_AND_EXPOSURE_APPARATUS_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=36646>.

MHRA style

WikiPatents contributors, '18504007. WAFER CHUCK, METHOD FOR PRODUCING THE SAME, AND EXPOSURE APPARATUS simplified abstract (CANON KABUSHIKI KAISHA)', WikiPatents, , 4 March 2024, 05:28 UTC, <http://wikipatents.org/index.php?title=18504007._WAFER_CHUCK,_METHOD_FOR_PRODUCING_THE_SAME,_AND_EXPOSURE_APPARATUS_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=36646> [accessed 28 June 2024]

Chicago style

WikiPatents contributors, "18504007. WAFER CHUCK, METHOD FOR PRODUCING THE SAME, AND EXPOSURE APPARATUS simplified abstract (CANON KABUSHIKI KAISHA)," WikiPatents, , http://wikipatents.org/index.php?title=18504007._WAFER_CHUCK,_METHOD_FOR_PRODUCING_THE_SAME,_AND_EXPOSURE_APPARATUS_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=36646 (accessed June 28, 2024).

CBE/CSE style

WikiPatents contributors. 18504007. WAFER CHUCK, METHOD FOR PRODUCING THE SAME, AND EXPOSURE APPARATUS simplified abstract (CANON KABUSHIKI KAISHA) [Internet]. WikiPatents, ; 2024 Mar 4, 05:28 UTC [cited 2024 Jun 28]. Available from: http://wikipatents.org/index.php?title=18504007._WAFER_CHUCK,_METHOD_FOR_PRODUCING_THE_SAME,_AND_EXPOSURE_APPARATUS_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=36646.

Bluebook style

18504007. WAFER CHUCK, METHOD FOR PRODUCING THE SAME, AND EXPOSURE APPARATUS simplified abstract (CANON KABUSHIKI KAISHA), http://wikipatents.org/index.php?title=18504007._WAFER_CHUCK,_METHOD_FOR_PRODUCING_THE_SAME,_AND_EXPOSURE_APPARATUS_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=36646 (last visited June 28, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18504007. WAFER CHUCK, METHOD FOR PRODUCING THE SAME, AND EXPOSURE APPARATUS simplified abstract (CANON KABUSHIKI KAISHA) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18504007._WAFER_CHUCK,_METHOD_FOR_PRODUCING_THE_SAME,_AND_EXPOSURE_APPARATUS_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=36646",
   note = "[Online; accessed 28-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18504007. WAFER CHUCK, METHOD FOR PRODUCING THE SAME, AND EXPOSURE APPARATUS simplified abstract (CANON KABUSHIKI KAISHA) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18504007._WAFER_CHUCK,_METHOD_FOR_PRODUCING_THE_SAME,_AND_EXPOSURE_APPARATUS_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=36646}",
   note = "[Online; accessed 28-June-2024]"
 }


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