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Bibliographic details for 18504007. WAFER CHUCK, METHOD FOR PRODUCING THE SAME, AND EXPOSURE APPARATUS simplified abstract (CANON KABUSHIKI KAISHA)
- Page name: 18504007. WAFER CHUCK, METHOD FOR PRODUCING THE SAME, AND EXPOSURE APPARATUS simplified abstract (CANON KABUSHIKI KAISHA)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 4 March 2024 05:28 UTC
- Date retrieved: 30 June 2024 12:15 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18504007._WAFER_CHUCK,_METHOD_FOR_PRODUCING_THE_SAME,_AND_EXPOSURE_APPARATUS_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=36646
- Page Version ID: 36646
Citation styles for 18504007. WAFER CHUCK, METHOD FOR PRODUCING THE SAME, AND EXPOSURE APPARATUS simplified abstract (CANON KABUSHIKI KAISHA)
APA style
18504007. WAFER CHUCK, METHOD FOR PRODUCING THE SAME, AND EXPOSURE APPARATUS simplified abstract (CANON KABUSHIKI KAISHA). (2024, March 4). WikiPatents, . Retrieved 12:15, June 30, 2024 from http://wikipatents.org/index.php?title=18504007._WAFER_CHUCK,_METHOD_FOR_PRODUCING_THE_SAME,_AND_EXPOSURE_APPARATUS_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=36646.
MLA style
"18504007. WAFER CHUCK, METHOD FOR PRODUCING THE SAME, AND EXPOSURE APPARATUS simplified abstract (CANON KABUSHIKI KAISHA)." WikiPatents, . 4 Mar 2024, 05:28 UTC. 30 Jun 2024, 12:15 <http://wikipatents.org/index.php?title=18504007._WAFER_CHUCK,_METHOD_FOR_PRODUCING_THE_SAME,_AND_EXPOSURE_APPARATUS_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=36646>.
MHRA style
WikiPatents contributors, '18504007. WAFER CHUCK, METHOD FOR PRODUCING THE SAME, AND EXPOSURE APPARATUS simplified abstract (CANON KABUSHIKI KAISHA)', WikiPatents, , 4 March 2024, 05:28 UTC, <http://wikipatents.org/index.php?title=18504007._WAFER_CHUCK,_METHOD_FOR_PRODUCING_THE_SAME,_AND_EXPOSURE_APPARATUS_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=36646> [accessed 30 June 2024]
Chicago style
WikiPatents contributors, "18504007. WAFER CHUCK, METHOD FOR PRODUCING THE SAME, AND EXPOSURE APPARATUS simplified abstract (CANON KABUSHIKI KAISHA)," WikiPatents, , http://wikipatents.org/index.php?title=18504007._WAFER_CHUCK,_METHOD_FOR_PRODUCING_THE_SAME,_AND_EXPOSURE_APPARATUS_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=36646 (accessed June 30, 2024).
CBE/CSE style
WikiPatents contributors. 18504007. WAFER CHUCK, METHOD FOR PRODUCING THE SAME, AND EXPOSURE APPARATUS simplified abstract (CANON KABUSHIKI KAISHA) [Internet]. WikiPatents, ; 2024 Mar 4, 05:28 UTC [cited 2024 Jun 30]. Available from: http://wikipatents.org/index.php?title=18504007._WAFER_CHUCK,_METHOD_FOR_PRODUCING_THE_SAME,_AND_EXPOSURE_APPARATUS_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=36646.
Bluebook style
18504007. WAFER CHUCK, METHOD FOR PRODUCING THE SAME, AND EXPOSURE APPARATUS simplified abstract (CANON KABUSHIKI KAISHA), http://wikipatents.org/index.php?title=18504007._WAFER_CHUCK,_METHOD_FOR_PRODUCING_THE_SAME,_AND_EXPOSURE_APPARATUS_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=36646 (last visited June 30, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "18504007. WAFER CHUCK, METHOD FOR PRODUCING THE SAME, AND EXPOSURE APPARATUS simplified abstract (CANON KABUSHIKI KAISHA) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=18504007._WAFER_CHUCK,_METHOD_FOR_PRODUCING_THE_SAME,_AND_EXPOSURE_APPARATUS_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=36646", note = "[Online; accessed 30-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "18504007. WAFER CHUCK, METHOD FOR PRODUCING THE SAME, AND EXPOSURE APPARATUS simplified abstract (CANON KABUSHIKI KAISHA) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=18504007._WAFER_CHUCK,_METHOD_FOR_PRODUCING_THE_SAME,_AND_EXPOSURE_APPARATUS_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=36646}", note = "[Online; accessed 30-June-2024]" }