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Bibliographic details for 18236537. SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

Citation styles for 18236537. SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

APA style

18236537. SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.). (2024, March 4). WikiPatents, . Retrieved 10:38, June 26, 2024 from http://wikipatents.org/index.php?title=18236537._SUBSTRATE_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=36067.

MLA style

"18236537. SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 4 Mar 2024, 03:30 UTC. 26 Jun 2024, 10:38 <http://wikipatents.org/index.php?title=18236537._SUBSTRATE_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=36067>.

MHRA style

WikiPatents contributors, '18236537. SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 4 March 2024, 03:30 UTC, <http://wikipatents.org/index.php?title=18236537._SUBSTRATE_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=36067> [accessed 26 June 2024]

Chicago style

WikiPatents contributors, "18236537. SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18236537._SUBSTRATE_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=36067 (accessed June 26, 2024).

CBE/CSE style

WikiPatents contributors. 18236537. SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 Mar 4, 03:30 UTC [cited 2024 Jun 26]. Available from: http://wikipatents.org/index.php?title=18236537._SUBSTRATE_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=36067.

Bluebook style

18236537. SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=18236537._SUBSTRATE_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=36067 (last visited June 26, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18236537. SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18236537._SUBSTRATE_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=36067",
   note = "[Online; accessed 26-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18236537. SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18236537._SUBSTRATE_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=36067}",
   note = "[Online; accessed 26-June-2024]"
 }


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