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Bibliographic details for 18236748. EDGE RING, DRY ETCHING APPARATUS HAVING THE SAME, AND OPERATION METHOD OF ETCHING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)

Citation styles for 18236748. EDGE RING, DRY ETCHING APPARATUS HAVING THE SAME, AND OPERATION METHOD OF ETCHING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)

APA style

18236748. EDGE RING, DRY ETCHING APPARATUS HAVING THE SAME, AND OPERATION METHOD OF ETCHING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.). (2024, March 4). WikiPatents, . Retrieved 04:43, September 26, 2024 from http://wikipatents.org/index.php?title=18236748._EDGE_RING,_DRY_ETCHING_APPARATUS_HAVING_THE_SAME,_AND_OPERATION_METHOD_OF_ETCHING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=36062.

MLA style

"18236748. EDGE RING, DRY ETCHING APPARATUS HAVING THE SAME, AND OPERATION METHOD OF ETCHING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 4 Mar 2024, 03:29 UTC. 26 Sep 2024, 04:43 <http://wikipatents.org/index.php?title=18236748._EDGE_RING,_DRY_ETCHING_APPARATUS_HAVING_THE_SAME,_AND_OPERATION_METHOD_OF_ETCHING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=36062>.

MHRA style

WikiPatents contributors, '18236748. EDGE RING, DRY ETCHING APPARATUS HAVING THE SAME, AND OPERATION METHOD OF ETCHING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 4 March 2024, 03:29 UTC, <http://wikipatents.org/index.php?title=18236748._EDGE_RING,_DRY_ETCHING_APPARATUS_HAVING_THE_SAME,_AND_OPERATION_METHOD_OF_ETCHING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=36062> [accessed 26 September 2024]

Chicago style

WikiPatents contributors, "18236748. EDGE RING, DRY ETCHING APPARATUS HAVING THE SAME, AND OPERATION METHOD OF ETCHING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18236748._EDGE_RING,_DRY_ETCHING_APPARATUS_HAVING_THE_SAME,_AND_OPERATION_METHOD_OF_ETCHING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=36062 (accessed September 26, 2024).

CBE/CSE style

WikiPatents contributors. 18236748. EDGE RING, DRY ETCHING APPARATUS HAVING THE SAME, AND OPERATION METHOD OF ETCHING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 Mar 4, 03:29 UTC [cited 2024 Sep 26]. Available from: http://wikipatents.org/index.php?title=18236748._EDGE_RING,_DRY_ETCHING_APPARATUS_HAVING_THE_SAME,_AND_OPERATION_METHOD_OF_ETCHING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=36062.

Bluebook style

18236748. EDGE RING, DRY ETCHING APPARATUS HAVING THE SAME, AND OPERATION METHOD OF ETCHING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=18236748._EDGE_RING,_DRY_ETCHING_APPARATUS_HAVING_THE_SAME,_AND_OPERATION_METHOD_OF_ETCHING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=36062 (last visited September 26, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18236748. EDGE RING, DRY ETCHING APPARATUS HAVING THE SAME, AND OPERATION METHOD OF ETCHING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18236748._EDGE_RING,_DRY_ETCHING_APPARATUS_HAVING_THE_SAME,_AND_OPERATION_METHOD_OF_ETCHING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=36062",
   note = "[Online; accessed 26-September-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18236748. EDGE RING, DRY ETCHING APPARATUS HAVING THE SAME, AND OPERATION METHOD OF ETCHING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18236748._EDGE_RING,_DRY_ETCHING_APPARATUS_HAVING_THE_SAME,_AND_OPERATION_METHOD_OF_ETCHING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=36062}",
   note = "[Online; accessed 26-September-2024]"
 }


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