Cite This Page

Jump to navigation Jump to search

Bibliographic details for 20240038504. REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES simplified abstract (Lam Research Corporation)

Citation styles for 20240038504. REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES simplified abstract (Lam Research Corporation)

APA style

20240038504. REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES simplified abstract (Lam Research Corporation). (2024, February 2). WikiPatents, . Retrieved 11:56, June 16, 2024 from http://wikipatents.org/index.php?title=20240038504._REPLACEABLE_AND/OR_COLLAPSIBLE_EDGE_RING_ASSEMBLIES_FOR_PLASMA_SHEATH_TUNING_INCORPORATING_EDGE_RING_POSITIONING_AND_CENTERING_FEATURES_simplified_abstract_(Lam_Research_Corporation)&oldid=30864.

MLA style

"20240038504. REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES simplified abstract (Lam Research Corporation)." WikiPatents, . 2 Feb 2024, 03:59 UTC. 16 Jun 2024, 11:56 <http://wikipatents.org/index.php?title=20240038504._REPLACEABLE_AND/OR_COLLAPSIBLE_EDGE_RING_ASSEMBLIES_FOR_PLASMA_SHEATH_TUNING_INCORPORATING_EDGE_RING_POSITIONING_AND_CENTERING_FEATURES_simplified_abstract_(Lam_Research_Corporation)&oldid=30864>.

MHRA style

WikiPatents contributors, '20240038504. REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES simplified abstract (Lam Research Corporation)', WikiPatents, , 2 February 2024, 03:59 UTC, <http://wikipatents.org/index.php?title=20240038504._REPLACEABLE_AND/OR_COLLAPSIBLE_EDGE_RING_ASSEMBLIES_FOR_PLASMA_SHEATH_TUNING_INCORPORATING_EDGE_RING_POSITIONING_AND_CENTERING_FEATURES_simplified_abstract_(Lam_Research_Corporation)&oldid=30864> [accessed 16 June 2024]

Chicago style

WikiPatents contributors, "20240038504. REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES simplified abstract (Lam Research Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=20240038504._REPLACEABLE_AND/OR_COLLAPSIBLE_EDGE_RING_ASSEMBLIES_FOR_PLASMA_SHEATH_TUNING_INCORPORATING_EDGE_RING_POSITIONING_AND_CENTERING_FEATURES_simplified_abstract_(Lam_Research_Corporation)&oldid=30864 (accessed June 16, 2024).

CBE/CSE style

WikiPatents contributors. 20240038504. REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES simplified abstract (Lam Research Corporation) [Internet]. WikiPatents, ; 2024 Feb 2, 03:59 UTC [cited 2024 Jun 16]. Available from: http://wikipatents.org/index.php?title=20240038504._REPLACEABLE_AND/OR_COLLAPSIBLE_EDGE_RING_ASSEMBLIES_FOR_PLASMA_SHEATH_TUNING_INCORPORATING_EDGE_RING_POSITIONING_AND_CENTERING_FEATURES_simplified_abstract_(Lam_Research_Corporation)&oldid=30864.

Bluebook style

20240038504. REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES simplified abstract (Lam Research Corporation), http://wikipatents.org/index.php?title=20240038504._REPLACEABLE_AND/OR_COLLAPSIBLE_EDGE_RING_ASSEMBLIES_FOR_PLASMA_SHEATH_TUNING_INCORPORATING_EDGE_RING_POSITIONING_AND_CENTERING_FEATURES_simplified_abstract_(Lam_Research_Corporation)&oldid=30864 (last visited June 16, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "20240038504. REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES simplified abstract (Lam Research Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=20240038504._REPLACEABLE_AND/OR_COLLAPSIBLE_EDGE_RING_ASSEMBLIES_FOR_PLASMA_SHEATH_TUNING_INCORPORATING_EDGE_RING_POSITIONING_AND_CENTERING_FEATURES_simplified_abstract_(Lam_Research_Corporation)&oldid=30864",
   note = "[Online; accessed 16-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "20240038504. REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES simplified abstract (Lam Research Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=20240038504._REPLACEABLE_AND/OR_COLLAPSIBLE_EDGE_RING_ASSEMBLIES_FOR_PLASMA_SHEATH_TUNING_INCORPORATING_EDGE_RING_POSITIONING_AND_CENTERING_FEATURES_simplified_abstract_(Lam_Research_Corporation)&oldid=30864}",
   note = "[Online; accessed 16-June-2024]"
 }


Retrieved from "http://wikipatents.org/index.php?title=Special:CiteThisPage"