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Bibliographic details for 20240033766. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited)
- Page name: 20240033766. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 1 February 2024 09:37 UTC
- Date retrieved: 20 June 2024 21:08 UTC
- Permanent URL: http://wikipatents.org/index.php?title=20240033766._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=30540
- Page Version ID: 30540
Citation styles for 20240033766. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited)
APA style
20240033766. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited). (2024, February 1). WikiPatents, . Retrieved 21:08, June 20, 2024 from http://wikipatents.org/index.php?title=20240033766._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=30540.
MLA style
"20240033766. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited)." WikiPatents, . 1 Feb 2024, 09:37 UTC. 20 Jun 2024, 21:08 <http://wikipatents.org/index.php?title=20240033766._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=30540>.
MHRA style
WikiPatents contributors, '20240033766. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited)', WikiPatents, , 1 February 2024, 09:37 UTC, <http://wikipatents.org/index.php?title=20240033766._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=30540> [accessed 20 June 2024]
Chicago style
WikiPatents contributors, "20240033766. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=20240033766._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=30540 (accessed June 20, 2024).
CBE/CSE style
WikiPatents contributors. 20240033766. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Feb 1, 09:37 UTC [cited 2024 Jun 20]. Available from: http://wikipatents.org/index.php?title=20240033766._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=30540.
Bluebook style
20240033766. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=20240033766._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=30540 (last visited June 20, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "20240033766. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=20240033766._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=30540", note = "[Online; accessed 20-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "20240033766. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=20240033766._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=30540}", note = "[Online; accessed 20-June-2024]" }