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Bibliographic details for 18139840. ATOMIC LAYER ETCHING (ALE) APPARATUS AND ALE METHOD BASED ON THE APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

Citation styles for 18139840. ATOMIC LAYER ETCHING (ALE) APPARATUS AND ALE METHOD BASED ON THE APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

APA style

18139840. ATOMIC LAYER ETCHING (ALE) APPARATUS AND ALE METHOD BASED ON THE APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.). (2024, January 25). WikiPatents, . Retrieved 13:15, June 26, 2024 from http://wikipatents.org/index.php?title=18139840._ATOMIC_LAYER_ETCHING_(ALE)_APPARATUS_AND_ALE_METHOD_BASED_ON_THE_APPARATUS_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=29176.

MLA style

"18139840. ATOMIC LAYER ETCHING (ALE) APPARATUS AND ALE METHOD BASED ON THE APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)." WikiPatents, . 25 Jan 2024, 09:21 UTC. 26 Jun 2024, 13:15 <http://wikipatents.org/index.php?title=18139840._ATOMIC_LAYER_ETCHING_(ALE)_APPARATUS_AND_ALE_METHOD_BASED_ON_THE_APPARATUS_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=29176>.

MHRA style

WikiPatents contributors, '18139840. ATOMIC LAYER ETCHING (ALE) APPARATUS AND ALE METHOD BASED ON THE APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)', WikiPatents, , 25 January 2024, 09:21 UTC, <http://wikipatents.org/index.php?title=18139840._ATOMIC_LAYER_ETCHING_(ALE)_APPARATUS_AND_ALE_METHOD_BASED_ON_THE_APPARATUS_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=29176> [accessed 26 June 2024]

Chicago style

WikiPatents contributors, "18139840. ATOMIC LAYER ETCHING (ALE) APPARATUS AND ALE METHOD BASED ON THE APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=18139840._ATOMIC_LAYER_ETCHING_(ALE)_APPARATUS_AND_ALE_METHOD_BASED_ON_THE_APPARATUS_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=29176 (accessed June 26, 2024).

CBE/CSE style

WikiPatents contributors. 18139840. ATOMIC LAYER ETCHING (ALE) APPARATUS AND ALE METHOD BASED ON THE APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) [Internet]. WikiPatents, ; 2024 Jan 25, 09:21 UTC [cited 2024 Jun 26]. Available from: http://wikipatents.org/index.php?title=18139840._ATOMIC_LAYER_ETCHING_(ALE)_APPARATUS_AND_ALE_METHOD_BASED_ON_THE_APPARATUS_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=29176.

Bluebook style

18139840. ATOMIC LAYER ETCHING (ALE) APPARATUS AND ALE METHOD BASED ON THE APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.), http://wikipatents.org/index.php?title=18139840._ATOMIC_LAYER_ETCHING_(ALE)_APPARATUS_AND_ALE_METHOD_BASED_ON_THE_APPARATUS_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=29176 (last visited June 26, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18139840. ATOMIC LAYER ETCHING (ALE) APPARATUS AND ALE METHOD BASED ON THE APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18139840._ATOMIC_LAYER_ETCHING_(ALE)_APPARATUS_AND_ALE_METHOD_BASED_ON_THE_APPARATUS_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=29176",
   note = "[Online; accessed 26-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18139840. ATOMIC LAYER ETCHING (ALE) APPARATUS AND ALE METHOD BASED ON THE APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18139840._ATOMIC_LAYER_ETCHING_(ALE)_APPARATUS_AND_ALE_METHOD_BASED_ON_THE_APPARATUS_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=29176}",
   note = "[Online; accessed 26-June-2024]"
 }


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