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Bibliographic details for 18215454. SUBSTRATE PROCESSING APPARATUS AND EXHAUST METHOD THEREOF simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

Citation styles for 18215454. SUBSTRATE PROCESSING APPARATUS AND EXHAUST METHOD THEREOF simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

APA style

18215454. SUBSTRATE PROCESSING APPARATUS AND EXHAUST METHOD THEREOF simplified abstract (SAMSUNG ELECTRONICS CO., LTD.). (2024, January 25). WikiPatents, . Retrieved 23:10, June 19, 2024 from http://wikipatents.org/index.php?title=18215454._SUBSTRATE_PROCESSING_APPARATUS_AND_EXHAUST_METHOD_THEREOF_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=29124.

MLA style

"18215454. SUBSTRATE PROCESSING APPARATUS AND EXHAUST METHOD THEREOF simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)." WikiPatents, . 25 Jan 2024, 09:12 UTC. 19 Jun 2024, 23:10 <http://wikipatents.org/index.php?title=18215454._SUBSTRATE_PROCESSING_APPARATUS_AND_EXHAUST_METHOD_THEREOF_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=29124>.

MHRA style

WikiPatents contributors, '18215454. SUBSTRATE PROCESSING APPARATUS AND EXHAUST METHOD THEREOF simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)', WikiPatents, , 25 January 2024, 09:12 UTC, <http://wikipatents.org/index.php?title=18215454._SUBSTRATE_PROCESSING_APPARATUS_AND_EXHAUST_METHOD_THEREOF_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=29124> [accessed 19 June 2024]

Chicago style

WikiPatents contributors, "18215454. SUBSTRATE PROCESSING APPARATUS AND EXHAUST METHOD THEREOF simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=18215454._SUBSTRATE_PROCESSING_APPARATUS_AND_EXHAUST_METHOD_THEREOF_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=29124 (accessed June 19, 2024).

CBE/CSE style

WikiPatents contributors. 18215454. SUBSTRATE PROCESSING APPARATUS AND EXHAUST METHOD THEREOF simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) [Internet]. WikiPatents, ; 2024 Jan 25, 09:12 UTC [cited 2024 Jun 19]. Available from: http://wikipatents.org/index.php?title=18215454._SUBSTRATE_PROCESSING_APPARATUS_AND_EXHAUST_METHOD_THEREOF_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=29124.

Bluebook style

18215454. SUBSTRATE PROCESSING APPARATUS AND EXHAUST METHOD THEREOF simplified abstract (SAMSUNG ELECTRONICS CO., LTD.), http://wikipatents.org/index.php?title=18215454._SUBSTRATE_PROCESSING_APPARATUS_AND_EXHAUST_METHOD_THEREOF_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=29124 (last visited June 19, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18215454. SUBSTRATE PROCESSING APPARATUS AND EXHAUST METHOD THEREOF simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18215454._SUBSTRATE_PROCESSING_APPARATUS_AND_EXHAUST_METHOD_THEREOF_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=29124",
   note = "[Online; accessed 19-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18215454. SUBSTRATE PROCESSING APPARATUS AND EXHAUST METHOD THEREOF simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18215454._SUBSTRATE_PROCESSING_APPARATUS_AND_EXHAUST_METHOD_THEREOF_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=29124}",
   note = "[Online; accessed 19-June-2024]"
 }


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