Cite This Page

Jump to navigation Jump to search

Bibliographic details for 18198482. SUBSTRATE TEMPERATURE MEASURING DEVICE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE TEMPERATURE MEASURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

Citation styles for 18198482. SUBSTRATE TEMPERATURE MEASURING DEVICE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE TEMPERATURE MEASURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

APA style

18198482. SUBSTRATE TEMPERATURE MEASURING DEVICE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE TEMPERATURE MEASURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.). (2024, January 22). WikiPatents, . Retrieved 04:02, September 22, 2024 from http://wikipatents.org/index.php?title=18198482._SUBSTRATE_TEMPERATURE_MEASURING_DEVICE,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_TEMPERATURE_MEASURING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=28918.

MLA style

"18198482. SUBSTRATE TEMPERATURE MEASURING DEVICE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE TEMPERATURE MEASURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 22 Jan 2024, 03:55 UTC. 22 Sep 2024, 04:02 <http://wikipatents.org/index.php?title=18198482._SUBSTRATE_TEMPERATURE_MEASURING_DEVICE,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_TEMPERATURE_MEASURING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=28918>.

MHRA style

WikiPatents contributors, '18198482. SUBSTRATE TEMPERATURE MEASURING DEVICE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE TEMPERATURE MEASURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 22 January 2024, 03:55 UTC, <http://wikipatents.org/index.php?title=18198482._SUBSTRATE_TEMPERATURE_MEASURING_DEVICE,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_TEMPERATURE_MEASURING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=28918> [accessed 22 September 2024]

Chicago style

WikiPatents contributors, "18198482. SUBSTRATE TEMPERATURE MEASURING DEVICE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE TEMPERATURE MEASURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18198482._SUBSTRATE_TEMPERATURE_MEASURING_DEVICE,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_TEMPERATURE_MEASURING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=28918 (accessed September 22, 2024).

CBE/CSE style

WikiPatents contributors. 18198482. SUBSTRATE TEMPERATURE MEASURING DEVICE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE TEMPERATURE MEASURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 Jan 22, 03:55 UTC [cited 2024 Sep 22]. Available from: http://wikipatents.org/index.php?title=18198482._SUBSTRATE_TEMPERATURE_MEASURING_DEVICE,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_TEMPERATURE_MEASURING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=28918.

Bluebook style

18198482. SUBSTRATE TEMPERATURE MEASURING DEVICE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE TEMPERATURE MEASURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=18198482._SUBSTRATE_TEMPERATURE_MEASURING_DEVICE,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_TEMPERATURE_MEASURING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=28918 (last visited September 22, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18198482. SUBSTRATE TEMPERATURE MEASURING DEVICE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE TEMPERATURE MEASURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18198482._SUBSTRATE_TEMPERATURE_MEASURING_DEVICE,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_TEMPERATURE_MEASURING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=28918",
   note = "[Online; accessed 22-September-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18198482. SUBSTRATE TEMPERATURE MEASURING DEVICE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE TEMPERATURE MEASURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18198482._SUBSTRATE_TEMPERATURE_MEASURING_DEVICE,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_TEMPERATURE_MEASURING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=28918}",
   note = "[Online; accessed 22-September-2024]"
 }


Retrieved from "http://wikipatents.org/index.php?title=Special:CiteThisPage"