Cite This Page
Bibliographic details for 20240021421. VACUUM DEPOSITION INTO TRENCHES AND VIAS simplified abstract (Ascentool, Inc.)
- Page name: 20240021421. VACUUM DEPOSITION INTO TRENCHES AND VIAS simplified abstract (Ascentool, Inc.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 19 January 2024 10:28 UTC
- Date retrieved: 21 June 2024 04:39 UTC
- Permanent URL: http://wikipatents.org/index.php?title=20240021421._VACUUM_DEPOSITION_INTO_TRENCHES_AND_VIAS_simplified_abstract_(Ascentool,_Inc.)&oldid=28676
- Page Version ID: 28676
Citation styles for 20240021421. VACUUM DEPOSITION INTO TRENCHES AND VIAS simplified abstract (Ascentool, Inc.)
APA style
20240021421. VACUUM DEPOSITION INTO TRENCHES AND VIAS simplified abstract (Ascentool, Inc.). (2024, January 19). WikiPatents, . Retrieved 04:39, June 21, 2024 from http://wikipatents.org/index.php?title=20240021421._VACUUM_DEPOSITION_INTO_TRENCHES_AND_VIAS_simplified_abstract_(Ascentool,_Inc.)&oldid=28676.
MLA style
"20240021421. VACUUM DEPOSITION INTO TRENCHES AND VIAS simplified abstract (Ascentool, Inc.)." WikiPatents, . 19 Jan 2024, 10:28 UTC. 21 Jun 2024, 04:39 <http://wikipatents.org/index.php?title=20240021421._VACUUM_DEPOSITION_INTO_TRENCHES_AND_VIAS_simplified_abstract_(Ascentool,_Inc.)&oldid=28676>.
MHRA style
WikiPatents contributors, '20240021421. VACUUM DEPOSITION INTO TRENCHES AND VIAS simplified abstract (Ascentool, Inc.)', WikiPatents, , 19 January 2024, 10:28 UTC, <http://wikipatents.org/index.php?title=20240021421._VACUUM_DEPOSITION_INTO_TRENCHES_AND_VIAS_simplified_abstract_(Ascentool,_Inc.)&oldid=28676> [accessed 21 June 2024]
Chicago style
WikiPatents contributors, "20240021421. VACUUM DEPOSITION INTO TRENCHES AND VIAS simplified abstract (Ascentool, Inc.)," WikiPatents, , http://wikipatents.org/index.php?title=20240021421._VACUUM_DEPOSITION_INTO_TRENCHES_AND_VIAS_simplified_abstract_(Ascentool,_Inc.)&oldid=28676 (accessed June 21, 2024).
CBE/CSE style
WikiPatents contributors. 20240021421. VACUUM DEPOSITION INTO TRENCHES AND VIAS simplified abstract (Ascentool, Inc.) [Internet]. WikiPatents, ; 2024 Jan 19, 10:28 UTC [cited 2024 Jun 21]. Available from: http://wikipatents.org/index.php?title=20240021421._VACUUM_DEPOSITION_INTO_TRENCHES_AND_VIAS_simplified_abstract_(Ascentool,_Inc.)&oldid=28676.
Bluebook style
20240021421. VACUUM DEPOSITION INTO TRENCHES AND VIAS simplified abstract (Ascentool, Inc.), http://wikipatents.org/index.php?title=20240021421._VACUUM_DEPOSITION_INTO_TRENCHES_AND_VIAS_simplified_abstract_(Ascentool,_Inc.)&oldid=28676 (last visited June 21, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "20240021421. VACUUM DEPOSITION INTO TRENCHES AND VIAS simplified abstract (Ascentool, Inc.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=20240021421._VACUUM_DEPOSITION_INTO_TRENCHES_AND_VIAS_simplified_abstract_(Ascentool,_Inc.)&oldid=28676", note = "[Online; accessed 21-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "20240021421. VACUUM DEPOSITION INTO TRENCHES AND VIAS simplified abstract (Ascentool, Inc.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=20240021421._VACUUM_DEPOSITION_INTO_TRENCHES_AND_VIAS_simplified_abstract_(Ascentool,_Inc.)&oldid=28676}", note = "[Online; accessed 21-June-2024]" }