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Bibliographic details for 20240011150. METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHOD OF FORMING A PATTERNED LAYER OF MATERIAL simplified abstract (ASML Netherlands B.V.)
- Page name: 20240011150. METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHOD OF FORMING A PATTERNED LAYER OF MATERIAL simplified abstract (ASML Netherlands B.V.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 11 January 2024 10:35 UTC
- Date retrieved: 26 September 2024 18:12 UTC
- Permanent URL: http://wikipatents.org/index.php?title=20240011150._METHOD_AND_APPARATUS_FOR_FORMING_A_PATTERNED_LAYER_OF_CARBON,_METHOD_OF_FORMING_A_PATTERNED_LAYER_OF_MATERIAL_simplified_abstract_(ASML_Netherlands_B.V.)&oldid=27528
- Page Version ID: 27528
Citation styles for 20240011150. METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHOD OF FORMING A PATTERNED LAYER OF MATERIAL simplified abstract (ASML Netherlands B.V.)
APA style
20240011150. METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHOD OF FORMING A PATTERNED LAYER OF MATERIAL simplified abstract (ASML Netherlands B.V.). (2024, January 11). WikiPatents, . Retrieved 18:12, September 26, 2024 from http://wikipatents.org/index.php?title=20240011150._METHOD_AND_APPARATUS_FOR_FORMING_A_PATTERNED_LAYER_OF_CARBON,_METHOD_OF_FORMING_A_PATTERNED_LAYER_OF_MATERIAL_simplified_abstract_(ASML_Netherlands_B.V.)&oldid=27528.
MLA style
"20240011150. METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHOD OF FORMING A PATTERNED LAYER OF MATERIAL simplified abstract (ASML Netherlands B.V.)." WikiPatents, . 11 Jan 2024, 10:35 UTC. 26 Sep 2024, 18:12 <http://wikipatents.org/index.php?title=20240011150._METHOD_AND_APPARATUS_FOR_FORMING_A_PATTERNED_LAYER_OF_CARBON,_METHOD_OF_FORMING_A_PATTERNED_LAYER_OF_MATERIAL_simplified_abstract_(ASML_Netherlands_B.V.)&oldid=27528>.
MHRA style
WikiPatents contributors, '20240011150. METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHOD OF FORMING A PATTERNED LAYER OF MATERIAL simplified abstract (ASML Netherlands B.V.)', WikiPatents, , 11 January 2024, 10:35 UTC, <http://wikipatents.org/index.php?title=20240011150._METHOD_AND_APPARATUS_FOR_FORMING_A_PATTERNED_LAYER_OF_CARBON,_METHOD_OF_FORMING_A_PATTERNED_LAYER_OF_MATERIAL_simplified_abstract_(ASML_Netherlands_B.V.)&oldid=27528> [accessed 26 September 2024]
Chicago style
WikiPatents contributors, "20240011150. METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHOD OF FORMING A PATTERNED LAYER OF MATERIAL simplified abstract (ASML Netherlands B.V.)," WikiPatents, , http://wikipatents.org/index.php?title=20240011150._METHOD_AND_APPARATUS_FOR_FORMING_A_PATTERNED_LAYER_OF_CARBON,_METHOD_OF_FORMING_A_PATTERNED_LAYER_OF_MATERIAL_simplified_abstract_(ASML_Netherlands_B.V.)&oldid=27528 (accessed September 26, 2024).
CBE/CSE style
WikiPatents contributors. 20240011150. METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHOD OF FORMING A PATTERNED LAYER OF MATERIAL simplified abstract (ASML Netherlands B.V.) [Internet]. WikiPatents, ; 2024 Jan 11, 10:35 UTC [cited 2024 Sep 26]. Available from: http://wikipatents.org/index.php?title=20240011150._METHOD_AND_APPARATUS_FOR_FORMING_A_PATTERNED_LAYER_OF_CARBON,_METHOD_OF_FORMING_A_PATTERNED_LAYER_OF_MATERIAL_simplified_abstract_(ASML_Netherlands_B.V.)&oldid=27528.
Bluebook style
20240011150. METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHOD OF FORMING A PATTERNED LAYER OF MATERIAL simplified abstract (ASML Netherlands B.V.), http://wikipatents.org/index.php?title=20240011150._METHOD_AND_APPARATUS_FOR_FORMING_A_PATTERNED_LAYER_OF_CARBON,_METHOD_OF_FORMING_A_PATTERNED_LAYER_OF_MATERIAL_simplified_abstract_(ASML_Netherlands_B.V.)&oldid=27528 (last visited September 26, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "20240011150. METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHOD OF FORMING A PATTERNED LAYER OF MATERIAL simplified abstract (ASML Netherlands B.V.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=20240011150._METHOD_AND_APPARATUS_FOR_FORMING_A_PATTERNED_LAYER_OF_CARBON,_METHOD_OF_FORMING_A_PATTERNED_LAYER_OF_MATERIAL_simplified_abstract_(ASML_Netherlands_B.V.)&oldid=27528", note = "[Online; accessed 26-September-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "20240011150. METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHOD OF FORMING A PATTERNED LAYER OF MATERIAL simplified abstract (ASML Netherlands B.V.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=20240011150._METHOD_AND_APPARATUS_FOR_FORMING_A_PATTERNED_LAYER_OF_CARBON,_METHOD_OF_FORMING_A_PATTERNED_LAYER_OF_MATERIAL_simplified_abstract_(ASML_Netherlands_B.V.)&oldid=27528}", note = "[Online; accessed 26-September-2024]" }