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Bibliographic details for 18741841. PLASMA PROCESSING APPARATUS (Tokyo Electron Limited)
- Page name: 18741841. PLASMA PROCESSING APPARATUS (Tokyo Electron Limited)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 19 December 2024 07:31 UTC
- Date retrieved: 7 January 2025 17:55 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18741841._PLASMA_PROCESSING_APPARATUS_(Tokyo_Electron_Limited)&oldid=270929
- Page Version ID: 270929
Citation styles for 18741841. PLASMA PROCESSING APPARATUS (Tokyo Electron Limited)
APA style
18741841. PLASMA PROCESSING APPARATUS (Tokyo Electron Limited). (2024, December 19). WikiPatents, . Retrieved 17:55, January 7, 2025 from http://wikipatents.org/index.php?title=18741841._PLASMA_PROCESSING_APPARATUS_(Tokyo_Electron_Limited)&oldid=270929.
MLA style
"18741841. PLASMA PROCESSING APPARATUS (Tokyo Electron Limited)." WikiPatents, . 19 Dec 2024, 07:31 UTC. 7 Jan 2025, 17:55 <http://wikipatents.org/index.php?title=18741841._PLASMA_PROCESSING_APPARATUS_(Tokyo_Electron_Limited)&oldid=270929>.
MHRA style
WikiPatents contributors, '18741841. PLASMA PROCESSING APPARATUS (Tokyo Electron Limited)', WikiPatents, , 19 December 2024, 07:31 UTC, <http://wikipatents.org/index.php?title=18741841._PLASMA_PROCESSING_APPARATUS_(Tokyo_Electron_Limited)&oldid=270929> [accessed 7 January 2025]
Chicago style
WikiPatents contributors, "18741841. PLASMA PROCESSING APPARATUS (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=18741841._PLASMA_PROCESSING_APPARATUS_(Tokyo_Electron_Limited)&oldid=270929 (accessed January 7, 2025).
CBE/CSE style
WikiPatents contributors. 18741841. PLASMA PROCESSING APPARATUS (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Dec 19, 07:31 UTC [cited 2025 Jan 7]. Available from: http://wikipatents.org/index.php?title=18741841._PLASMA_PROCESSING_APPARATUS_(Tokyo_Electron_Limited)&oldid=270929.
Bluebook style
18741841. PLASMA PROCESSING APPARATUS (Tokyo Electron Limited), http://wikipatents.org/index.php?title=18741841._PLASMA_PROCESSING_APPARATUS_(Tokyo_Electron_Limited)&oldid=270929 (last visited January 7, 2025).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18741841. PLASMA PROCESSING APPARATUS (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18741841._PLASMA_PROCESSING_APPARATUS_(Tokyo_Electron_Limited)&oldid=270929",
note = "[Online; accessed 7-January-2025]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18741841. PLASMA PROCESSING APPARATUS (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18741841._PLASMA_PROCESSING_APPARATUS_(Tokyo_Electron_Limited)&oldid=270929}",
note = "[Online; accessed 7-January-2025]"
}
