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Bibliographic details for 17940403. CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

Citation styles for 17940403. CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

APA style

17940403. CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.). (2024, January 5). WikiPatents, . Retrieved 07:04, June 16, 2024 from http://wikipatents.org/index.php?title=17940403._CHEMICAL_MECHANICAL_POLISHING_APPARATUS_AND_METHOD_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=26984.

MLA style

"17940403. CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)." WikiPatents, . 5 Jan 2024, 02:34 UTC. 16 Jun 2024, 07:04 <http://wikipatents.org/index.php?title=17940403._CHEMICAL_MECHANICAL_POLISHING_APPARATUS_AND_METHOD_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=26984>.

MHRA style

WikiPatents contributors, '17940403. CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)', WikiPatents, , 5 January 2024, 02:34 UTC, <http://wikipatents.org/index.php?title=17940403._CHEMICAL_MECHANICAL_POLISHING_APPARATUS_AND_METHOD_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=26984> [accessed 16 June 2024]

Chicago style

WikiPatents contributors, "17940403. CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=17940403._CHEMICAL_MECHANICAL_POLISHING_APPARATUS_AND_METHOD_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=26984 (accessed June 16, 2024).

CBE/CSE style

WikiPatents contributors. 17940403. CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) [Internet]. WikiPatents, ; 2024 Jan 5, 02:34 UTC [cited 2024 Jun 16]. Available from: http://wikipatents.org/index.php?title=17940403._CHEMICAL_MECHANICAL_POLISHING_APPARATUS_AND_METHOD_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=26984.

Bluebook style

17940403. CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.), http://wikipatents.org/index.php?title=17940403._CHEMICAL_MECHANICAL_POLISHING_APPARATUS_AND_METHOD_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=26984 (last visited June 16, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17940403. CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17940403._CHEMICAL_MECHANICAL_POLISHING_APPARATUS_AND_METHOD_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=26984",
   note = "[Online; accessed 16-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17940403. CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17940403._CHEMICAL_MECHANICAL_POLISHING_APPARATUS_AND_METHOD_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=26984}",
   note = "[Online; accessed 16-June-2024]"
 }


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