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Bibliographic details for 18081281. ELECTROSTATIC CHUCK INCLUDING UPPER PLATE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

Citation styles for 18081281. ELECTROSTATIC CHUCK INCLUDING UPPER PLATE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

APA style

18081281. ELECTROSTATIC CHUCK INCLUDING UPPER PLATE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.). (2024, January 4). WikiPatents, . Retrieved 12:55, June 17, 2024 from http://wikipatents.org/index.php?title=18081281._ELECTROSTATIC_CHUCK_INCLUDING_UPPER_PLATE_AND_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26097.

MLA style

"18081281. ELECTROSTATIC CHUCK INCLUDING UPPER PLATE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 4 Jan 2024, 09:16 UTC. 17 Jun 2024, 12:55 <http://wikipatents.org/index.php?title=18081281._ELECTROSTATIC_CHUCK_INCLUDING_UPPER_PLATE_AND_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26097>.

MHRA style

WikiPatents contributors, '18081281. ELECTROSTATIC CHUCK INCLUDING UPPER PLATE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 4 January 2024, 09:16 UTC, <http://wikipatents.org/index.php?title=18081281._ELECTROSTATIC_CHUCK_INCLUDING_UPPER_PLATE_AND_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26097> [accessed 17 June 2024]

Chicago style

WikiPatents contributors, "18081281. ELECTROSTATIC CHUCK INCLUDING UPPER PLATE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18081281._ELECTROSTATIC_CHUCK_INCLUDING_UPPER_PLATE_AND_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26097 (accessed June 17, 2024).

CBE/CSE style

WikiPatents contributors. 18081281. ELECTROSTATIC CHUCK INCLUDING UPPER PLATE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 Jan 4, 09:16 UTC [cited 2024 Jun 17]. Available from: http://wikipatents.org/index.php?title=18081281._ELECTROSTATIC_CHUCK_INCLUDING_UPPER_PLATE_AND_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26097.

Bluebook style

18081281. ELECTROSTATIC CHUCK INCLUDING UPPER PLATE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=18081281._ELECTROSTATIC_CHUCK_INCLUDING_UPPER_PLATE_AND_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26097 (last visited June 17, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18081281. ELECTROSTATIC CHUCK INCLUDING UPPER PLATE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18081281._ELECTROSTATIC_CHUCK_INCLUDING_UPPER_PLATE_AND_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26097",
   note = "[Online; accessed 17-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18081281. ELECTROSTATIC CHUCK INCLUDING UPPER PLATE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18081281._ELECTROSTATIC_CHUCK_INCLUDING_UPPER_PLATE_AND_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26097}",
   note = "[Online; accessed 17-June-2024]"
 }


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