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Bibliographic details for 17864541. PLASMA CONTROL APPARATUS AND PLASMA PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.)
- Page name: 17864541. PLASMA CONTROL APPARATUS AND PLASMA PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 4 January 2024 09:15 UTC
- Date retrieved: 23 June 2024 03:45 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17864541._PLASMA_CONTROL_APPARATUS_AND_PLASMA_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26091
- Page Version ID: 26091
Citation styles for 17864541. PLASMA CONTROL APPARATUS AND PLASMA PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.)
APA style
17864541. PLASMA CONTROL APPARATUS AND PLASMA PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.). (2024, January 4). WikiPatents, . Retrieved 03:45, June 23, 2024 from http://wikipatents.org/index.php?title=17864541._PLASMA_CONTROL_APPARATUS_AND_PLASMA_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26091.
MLA style
"17864541. PLASMA CONTROL APPARATUS AND PLASMA PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 4 Jan 2024, 09:15 UTC. 23 Jun 2024, 03:45 <http://wikipatents.org/index.php?title=17864541._PLASMA_CONTROL_APPARATUS_AND_PLASMA_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26091>.
MHRA style
WikiPatents contributors, '17864541. PLASMA CONTROL APPARATUS AND PLASMA PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 4 January 2024, 09:15 UTC, <http://wikipatents.org/index.php?title=17864541._PLASMA_CONTROL_APPARATUS_AND_PLASMA_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26091> [accessed 23 June 2024]
Chicago style
WikiPatents contributors, "17864541. PLASMA CONTROL APPARATUS AND PLASMA PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=17864541._PLASMA_CONTROL_APPARATUS_AND_PLASMA_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26091 (accessed June 23, 2024).
CBE/CSE style
WikiPatents contributors. 17864541. PLASMA CONTROL APPARATUS AND PLASMA PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 Jan 4, 09:15 UTC [cited 2024 Jun 23]. Available from: http://wikipatents.org/index.php?title=17864541._PLASMA_CONTROL_APPARATUS_AND_PLASMA_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26091.
Bluebook style
17864541. PLASMA CONTROL APPARATUS AND PLASMA PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=17864541._PLASMA_CONTROL_APPARATUS_AND_PLASMA_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26091 (last visited June 23, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17864541. PLASMA CONTROL APPARATUS AND PLASMA PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=17864541._PLASMA_CONTROL_APPARATUS_AND_PLASMA_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26091",
note = "[Online; accessed 23-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17864541. PLASMA CONTROL APPARATUS AND PLASMA PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=17864541._PLASMA_CONTROL_APPARATUS_AND_PLASMA_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26091}",
note = "[Online; accessed 23-June-2024]"
}
