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Bibliographic details for 17948943. PLASMA BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

Citation styles for 17948943. PLASMA BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

APA style

17948943. PLASMA BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.). (2024, January 4). WikiPatents, . Retrieved 09:11, June 26, 2024 from http://wikipatents.org/index.php?title=17948943._PLASMA_BAFFLE,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26089.

MLA style

"17948943. PLASMA BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 4 Jan 2024, 09:14 UTC. 26 Jun 2024, 09:11 <http://wikipatents.org/index.php?title=17948943._PLASMA_BAFFLE,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26089>.

MHRA style

WikiPatents contributors, '17948943. PLASMA BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 4 January 2024, 09:14 UTC, <http://wikipatents.org/index.php?title=17948943._PLASMA_BAFFLE,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26089> [accessed 26 June 2024]

Chicago style

WikiPatents contributors, "17948943. PLASMA BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=17948943._PLASMA_BAFFLE,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26089 (accessed June 26, 2024).

CBE/CSE style

WikiPatents contributors. 17948943. PLASMA BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 Jan 4, 09:14 UTC [cited 2024 Jun 26]. Available from: http://wikipatents.org/index.php?title=17948943._PLASMA_BAFFLE,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26089.

Bluebook style

17948943. PLASMA BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=17948943._PLASMA_BAFFLE,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26089 (last visited June 26, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17948943. PLASMA BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17948943._PLASMA_BAFFLE,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26089",
   note = "[Online; accessed 26-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17948943. PLASMA BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17948943._PLASMA_BAFFLE,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_SUBSTRATE_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26089}",
   note = "[Online; accessed 26-June-2024]"
 }


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