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Bibliographic details for 18164835. TARGET DEBRIS COLLECTION DEVICE AND EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

Citation styles for 18164835. TARGET DEBRIS COLLECTION DEVICE AND EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

APA style

18164835. TARGET DEBRIS COLLECTION DEVICE AND EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.). (2024, January 4). WikiPatents, . Retrieved 06:31, June 16, 2024 from http://wikipatents.org/index.php?title=18164835._TARGET_DEBRIS_COLLECTION_DEVICE_AND_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_APPARATUS_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26007.

MLA style

"18164835. TARGET DEBRIS COLLECTION DEVICE AND EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 4 Jan 2024, 09:03 UTC. 16 Jun 2024, 06:31 <http://wikipatents.org/index.php?title=18164835._TARGET_DEBRIS_COLLECTION_DEVICE_AND_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_APPARATUS_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26007>.

MHRA style

WikiPatents contributors, '18164835. TARGET DEBRIS COLLECTION DEVICE AND EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 4 January 2024, 09:03 UTC, <http://wikipatents.org/index.php?title=18164835._TARGET_DEBRIS_COLLECTION_DEVICE_AND_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_APPARATUS_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26007> [accessed 16 June 2024]

Chicago style

WikiPatents contributors, "18164835. TARGET DEBRIS COLLECTION DEVICE AND EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18164835._TARGET_DEBRIS_COLLECTION_DEVICE_AND_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_APPARATUS_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26007 (accessed June 16, 2024).

CBE/CSE style

WikiPatents contributors. 18164835. TARGET DEBRIS COLLECTION DEVICE AND EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 Jan 4, 09:03 UTC [cited 2024 Jun 16]. Available from: http://wikipatents.org/index.php?title=18164835._TARGET_DEBRIS_COLLECTION_DEVICE_AND_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_APPARATUS_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26007.

Bluebook style

18164835. TARGET DEBRIS COLLECTION DEVICE AND EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=18164835._TARGET_DEBRIS_COLLECTION_DEVICE_AND_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_APPARATUS_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26007 (last visited June 16, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18164835. TARGET DEBRIS COLLECTION DEVICE AND EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18164835._TARGET_DEBRIS_COLLECTION_DEVICE_AND_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_APPARATUS_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26007",
   note = "[Online; accessed 16-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18164835. TARGET DEBRIS COLLECTION DEVICE AND EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18164835._TARGET_DEBRIS_COLLECTION_DEVICE_AND_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_APPARATUS_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26007}",
   note = "[Online; accessed 16-June-2024]"
 }


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