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Bibliographic details for 17969200. OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)
- Page name: 17969200. OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 4 January 2024 09:01 UTC
- Date retrieved: 16 June 2024 04:19 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17969200._OPTICAL_MEASUREMENT_APPARATUS,_MEASURING_METHOD_USING_THE_SAME,_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=25994
- Page Version ID: 25994
Citation styles for 17969200. OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)
APA style
17969200. OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.). (2024, January 4). WikiPatents, . Retrieved 04:19, June 16, 2024 from http://wikipatents.org/index.php?title=17969200._OPTICAL_MEASUREMENT_APPARATUS,_MEASURING_METHOD_USING_THE_SAME,_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=25994.
MLA style
"17969200. OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 4 Jan 2024, 09:01 UTC. 16 Jun 2024, 04:19 <http://wikipatents.org/index.php?title=17969200._OPTICAL_MEASUREMENT_APPARATUS,_MEASURING_METHOD_USING_THE_SAME,_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=25994>.
MHRA style
WikiPatents contributors, '17969200. OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 4 January 2024, 09:01 UTC, <http://wikipatents.org/index.php?title=17969200._OPTICAL_MEASUREMENT_APPARATUS,_MEASURING_METHOD_USING_THE_SAME,_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=25994> [accessed 16 June 2024]
Chicago style
WikiPatents contributors, "17969200. OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=17969200._OPTICAL_MEASUREMENT_APPARATUS,_MEASURING_METHOD_USING_THE_SAME,_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=25994 (accessed June 16, 2024).
CBE/CSE style
WikiPatents contributors. 17969200. OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 Jan 4, 09:01 UTC [cited 2024 Jun 16]. Available from: http://wikipatents.org/index.php?title=17969200._OPTICAL_MEASUREMENT_APPARATUS,_MEASURING_METHOD_USING_THE_SAME,_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=25994.
Bluebook style
17969200. OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=17969200._OPTICAL_MEASUREMENT_APPARATUS,_MEASURING_METHOD_USING_THE_SAME,_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=25994 (last visited June 16, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "17969200. OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=17969200._OPTICAL_MEASUREMENT_APPARATUS,_MEASURING_METHOD_USING_THE_SAME,_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=25994", note = "[Online; accessed 16-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "17969200. OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=17969200._OPTICAL_MEASUREMENT_APPARATUS,_MEASURING_METHOD_USING_THE_SAME,_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=25994}", note = "[Online; accessed 16-June-2024]" }