Cite This Page

Jump to navigation Jump to search

Bibliographic details for 17543964. BEOL INTERCONNECT SUBTRACTIVE ETCH SUPER VIA simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION)

Citation styles for 17543964. BEOL INTERCONNECT SUBTRACTIVE ETCH SUPER VIA simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION)

APA style

17543964. BEOL INTERCONNECT SUBTRACTIVE ETCH SUPER VIA simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION). (2024, January 4). WikiPatents, . Retrieved 05:36, June 21, 2024 from http://wikipatents.org/index.php?title=17543964._BEOL_INTERCONNECT_SUBTRACTIVE_ETCH_SUPER_VIA_simplified_abstract_(INTERNATIONAL_BUSINESS_MACHINES_CORPORATION)&oldid=25792.

MLA style

"17543964. BEOL INTERCONNECT SUBTRACTIVE ETCH SUPER VIA simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION)." WikiPatents, . 4 Jan 2024, 06:54 UTC. 21 Jun 2024, 05:36 <http://wikipatents.org/index.php?title=17543964._BEOL_INTERCONNECT_SUBTRACTIVE_ETCH_SUPER_VIA_simplified_abstract_(INTERNATIONAL_BUSINESS_MACHINES_CORPORATION)&oldid=25792>.

MHRA style

WikiPatents contributors, '17543964. BEOL INTERCONNECT SUBTRACTIVE ETCH SUPER VIA simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION)', WikiPatents, , 4 January 2024, 06:54 UTC, <http://wikipatents.org/index.php?title=17543964._BEOL_INTERCONNECT_SUBTRACTIVE_ETCH_SUPER_VIA_simplified_abstract_(INTERNATIONAL_BUSINESS_MACHINES_CORPORATION)&oldid=25792> [accessed 21 June 2024]

Chicago style

WikiPatents contributors, "17543964. BEOL INTERCONNECT SUBTRACTIVE ETCH SUPER VIA simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION)," WikiPatents, , http://wikipatents.org/index.php?title=17543964._BEOL_INTERCONNECT_SUBTRACTIVE_ETCH_SUPER_VIA_simplified_abstract_(INTERNATIONAL_BUSINESS_MACHINES_CORPORATION)&oldid=25792 (accessed June 21, 2024).

CBE/CSE style

WikiPatents contributors. 17543964. BEOL INTERCONNECT SUBTRACTIVE ETCH SUPER VIA simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION) [Internet]. WikiPatents, ; 2024 Jan 4, 06:54 UTC [cited 2024 Jun 21]. Available from: http://wikipatents.org/index.php?title=17543964._BEOL_INTERCONNECT_SUBTRACTIVE_ETCH_SUPER_VIA_simplified_abstract_(INTERNATIONAL_BUSINESS_MACHINES_CORPORATION)&oldid=25792.

Bluebook style

17543964. BEOL INTERCONNECT SUBTRACTIVE ETCH SUPER VIA simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION), http://wikipatents.org/index.php?title=17543964._BEOL_INTERCONNECT_SUBTRACTIVE_ETCH_SUPER_VIA_simplified_abstract_(INTERNATIONAL_BUSINESS_MACHINES_CORPORATION)&oldid=25792 (last visited June 21, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17543964. BEOL INTERCONNECT SUBTRACTIVE ETCH SUPER VIA simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17543964._BEOL_INTERCONNECT_SUBTRACTIVE_ETCH_SUPER_VIA_simplified_abstract_(INTERNATIONAL_BUSINESS_MACHINES_CORPORATION)&oldid=25792",
   note = "[Online; accessed 21-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17543964. BEOL INTERCONNECT SUBTRACTIVE ETCH SUPER VIA simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17543964._BEOL_INTERCONNECT_SUBTRACTIVE_ETCH_SUPER_VIA_simplified_abstract_(INTERNATIONAL_BUSINESS_MACHINES_CORPORATION)&oldid=25792}",
   note = "[Online; accessed 21-June-2024]"
 }


Retrieved from "http://wikipatents.org/index.php?title=Special:CiteThisPage"